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Journal: Micromachines, 2024
Volume: 15
Number: 637
Article:
Grooving and Absorption on Substrates to Reduce the Bulk Acoustic Wave for Surface Acoustic Wave Micro-Force Sensors
Authors:
by
Yang Feng, Haoda Yu, Wenbo Liu, Keyong Hu, Shuifa Sun, Zhen Yang and Ben Wang
Link:
https://www.mdpi.com/2072-666X/15/5/637
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