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Sensors 2012, 12(12), 16571-16590; doi:10.3390/s121216571

Design, Fabrication and Characterization of a Low-Impedance 3D Electrode Array System for Neuro-Electrophysiology

1,* , 1
1 Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania 2 Department of Biophysics and Physiology, Faculty of Biology, University of Bucharest, Splaiul Independentei 91-95, 005095 Bucharest, Romania
* Author to whom correspondence should be addressed.
Received: 17 September 2012 / Revised: 8 November 2012 / Accepted: 9 November 2012 / Published: 3 December 2012
(This article belongs to the Special Issue Live Cell-Based Sensors)
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Recent progress in patterned microelectrode manufacturing technology and microfluidics has opened the way to a large variety of cellular and molecular biosensor-based applications. In this extremely diverse and rapidly expanding landscape, silicon-based technologies occupy a special position, given their statute of mature, consolidated, and highly accessible areas of development. Within the present work we report microfabrication procedures and workflows for 3D patterned gold-plated microelectrode arrays (MEA) of different shapes (pyramidal, conical and high aspect ratio), and we provide a detailed characterization of their physical features during all the fabrication steps to have in the end a reliable technology. Moreover, the electrical performances of MEA silicon chips mounted on standardized connector boards via ultrasound wire-bonding have been tested using non-destructive electrochemical methods: linear sweep and cyclic voltammetry, impedance spectroscopy. Further, an experimental recording chamber package suitable for in vitro electrophysiology experiments has been realized using custom-design electronics for electrical stimulus delivery and local field potential recording, included in a complete electrophysiology setup, and the experimental structures have been tested on newborn rat hippocampal slices, yielding similar performance compared to commercially available MEA equipments.
Keywords: 3D electrodes; MEA; fabrication; electrochemical characterization; neuro-electrophysiology tests 3D electrodes; MEA; fabrication; electrochemical characterization; neuro-electrophysiology tests
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Kusko, M.; Craciunoiu, F.; Amuzescu, B.; Halitzchi, F.; Selescu, T.; Radoi, A.; Popescu, M.; Simion, M.; Bragaru, A.; Ignat, T. Design, Fabrication and Characterization of a Low-Impedance 3D Electrode Array System for Neuro-Electrophysiology. Sensors 2012, 12, 16571-16590.

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