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Sensors 2013, 13(2), 1998-2010; doi:10.3390/s130201998
Article

A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes

,
,
*  and
School of Electronic Science and Technology, Faculty of Electronic Information and Electrical Engineering, Dalian University of Technology, Dalian 116023, China
* Author to whom correspondence should be addressed.
Received: 9 December 2012 / Revised: 14 January 2013 / Accepted: 15 January 2013 / Published: 4 February 2013
(This article belongs to the Section Physical Sensors)
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Abstract

For sensors constructed by freestanding membranes, when the gap between a freestanding membrane and the substrate or between membranes is at micron scale, the effects of near-field radiative heat transfer on the sensors’ thermal performance should be considered during sensor design. The radiative heat flux is transferred from a membrane to a plane or from a membrane to a membrane. In the current study of the near-field thermal radiation, the scanning probe technology has difficulty in making a membrane separated at micron scale parallel to a plane or another membrane. A novel MEMS (micro electromechanical system) device was developed by sacrificial layer technique in this work to realize a double parallel freestanding membrane structure. Each freestanding membrane has a platinum thin-film resistor and the distance between the two membranes is 1 m. After evaluating the electrical and thermal characteristics of the lower freestanding membrane, experimental measurements of near-field radiative heat transfer between the lower membrane and the upper membrane were carried out by setting the lower membrane as a heat emitter and the upper membrane as a heat receiver. The near-field radiative heat transfer between the two membranes was validated by finding a larger-than-blackbody radiative heat transfer based on the experimental data.
Keywords: MEMS; freestanding membrane; near-field; thermal radiation MEMS; freestanding membrane; near-field; thermal radiation
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Feng, C.; Tang, Z.; Yu, J.; Sun, C. A MEMS Device Capable of Measuring Near-Field Thermal Radiation between Membranes. Sensors 2013, 13, 1998-2010.

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