Next Article in Journal
A Self-Sensing Active Magnetic Bearing Based on a Direct Current Measurement Approach
Previous Article in Journal
Sensors in Agriculture and Forestry
Article Menu

Export Article

Open AccessArticle
Sensors 2013, 13(9), 12140-12148; doi:10.3390/s130912140

An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process

1
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
2
School of Electronics and Information Engineering, Tongji University, Shanghai 201804, China
3
Graduate School of Information, Production and System, Waseda University, Kitakyushu 808-0135, Japan
*
Author to whom correspondence should be addressed.
Received: 20 July 2013 / Revised: 26 August 2013 / Accepted: 3 September 2013 / Published: 10 September 2013
(This article belongs to the Section Chemical Sensors)
View Full-Text   |   Download PDF [427 KB, uploaded 21 June 2014]   |  

Abstract

In this study, a miniaturized high fundamental frequency quartz crystal microbalance (QCM) is fabricated for sensor applications using a wet etching technique. The vibration area is reduced in the fabrication of the high frequency QCM with an inverted mesa structure. To reduce the complexity of the side wall profile that results from anisotropic quartz etching, a rectangular vibration area is used instead of the conventional circular structure. QCMs with high Q values exceeding 25,000 at 47 MHz, 27,000 at 60 MHz, 24,000 at 73 MHz and 25,000 at 84 MHz are fabricated on 4 × 4 mm2 chips with small vibration areas of 1.2 × 1.4 mm2. A PMMA-based flow cell is designed and manufactured to characterize the behavior of the fabricated QCM chip in a liquid. Q values as high as 1,006 at 47 MHz, 904 at 62 MHz, 867 at 71 MHz and 747 at 84 MHz are obtained when one side of the chip is exposed to pure water. These results show that fabricated QCM chips can be used for bio- and chemical sensor applications in liquids.
Keywords: quartz crystal microbalance; high fundamental frequency; wet etching process; rectangle; high Q value quartz crystal microbalance; high fundamental frequency; wet etching process; rectangle; high Q value
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Liang, J.; Huang, J.; Zhang, T.; Zhang, J.; Li, X.; Ueda, T. An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process. Sensors 2013, 13, 12140-12148.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top