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Sensors 2017, 17(11), 2618; doi:10.3390/s17112618

Computational Experiments on the Step and Frequency Responses of a Three-Axis Thermal Accelerometer

1
Department of Mechanical Engineering, College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu, Shiga 525-8577, Japan
2
Murata Manufacturing Co., Ltd., Kyoto 617-8555, Japan
*
Author to whom correspondence should be addressed.
Received: 9 October 2017 / Revised: 9 November 2017 / Accepted: 11 November 2017 / Published: 14 November 2017
(This article belongs to the Special Issue Integrated MEMS Sensors for the IoT Era)
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Abstract

The sensor response has been reported to become highly nonlinear when the acceleration added to a thermal accelerator is very large, so the same response can be observed for two accelerations with different magnitudes and opposite signs. Some papers have reported the frequency response for the horizontal acceleration to be a first-order system, while others have reported it to be a second-order system. The response for the vertical acceleration has not been studied. In this study, computational experiments were performed to examine the step and frequency responses of a three-axis thermal accelerometer. The results showed that monitoring the temperatures at two positions and making use of cross-axis sensitivity allow a unique acceleration to be determined even when the range of the vertical acceleration is very large (e.g., −10,000–10,000 g). The frequency response was proven to be a second-order system for horizontal acceleration and a third-order system for vertical acceleration. View Full-Text
Keywords: thermal accelerometer; computational fluid dynamics; cross-axis sensitivity; step response; frequency response; nonlinearity thermal accelerometer; computational fluid dynamics; cross-axis sensitivity; step response; frequency response; nonlinearity
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ogami, Y.; Murakita, N.; Fukudome, K. Computational Experiments on the Step and Frequency Responses of a Three-Axis Thermal Accelerometer. Sensors 2017, 17, 2618.

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