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Sensors, Volume 4, Issue 10 (October 2004), Pages 156-169

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Research

Open AccessArticle Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation
Sensors 2004, 4(10), 156-162; doi:10.3390/s41000156
Received: 1 August 2004 / Accepted: 6 September 2004 / Published: 30 October 2004
Cited by 21 | PDF Full-text (302 KB) | HTML Full-text | XML Full-text
Abstract
Chalcogenide glasses offer an excellent “challenge” for their use and implementation in sensor arrays due to their good sensor-specific advantages in comparison to their crystalline counterparts. This paper will give an introduction on the preparation of chalcogenide glasses in the thin-film state. First,
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Chalcogenide glasses offer an excellent “challenge” for their use and implementation in sensor arrays due to their good sensor-specific advantages in comparison to their crystalline counterparts. This paper will give an introduction on the preparation of chalcogenide glasses in the thin-film state. First, single microsensors have been prepared with the methods of semiconductor technology. In a next step, three microsensors are implemented onto one single silicon substrate to an “one chip” sensor array. Different ionselective chalcogenide glass membranes (PbSAgIAs2S3, CdSAgIAs2S3, CuAgAsSeTe and TlAgAsIS) were prepared by means of the pulsed laser deposition (PLD) process. The different sensor membranes and structures have been physically characterized by means of Rutherford backscattering spectrometry, scanning electron microscopy and video microscopy. The electrochemical behavior has been investigated by potentiometric measurements. Full article
Open AccessArticle Fabrication of Thin-Film LAPS with Amorphous Silicon
Sensors 2004, 4(10), 163-169; doi:10.3390/s41000163
Received: 9 August 2004 / Accepted: 27 August 2004 / Published: 30 October 2004
Cited by 13 | PDF Full-text (303 KB) | HTML Full-text | XML Full-text
Abstract
To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated
[...] Read more.
To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated. Full article

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