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Sensors 2007, 7(8), 1399-1414; doi:10.3390/s7081399

Investigations of Slip Effect on the Performance of Micro Gas Bearings and Stability of Micro Rotor-Bearing Systems

State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, 800 DongChuan Road, Shanghai, 200240, People Republic of China
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Received: 27 June 2007 / Accepted: 2 August 2007 / Published: 3 August 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

Incorporating the velocity slip effect of the gas flow at the solid boundary, theperformance and dynamic response of a micro gas-bearing-rotor system are investigated inthis paper. For the characteristic length scale of the micro gas bearing, the gas flow in thebearing resides in the slip regime rather than in the continuum regime. The modifiedReynolds equations of different slip models are presented. Gas pressure distribution and loadcarrying capacity are obtained by solving the Reynolds equations with finite differentmethod (FDM). Comparing results from different models, it is found that the second orderslip model agrees reasonably well with the benchmarked solutions obtained from thelinearized Boltzmann equation. Therefore, dynamic coefficients derived from the secondorder slip model are employed to evaluate the linear dynamic stability and vibrationcharacteristics of the system. Compared with the continuum flow model, the slip effectreduces dynamic coefficients of the micro gas bearing, and the threshold speed for stableoperation is consequently raised. Also, dynamic analysis shows that the system responseschange with variation of the operating parameters including the eccentricity ratio, therotational speed, and the unbalance ratio. View Full-Text
Keywords: MEMS; Micro rotor; Micro gas bearing; Velocity slip; Mechanical performance; Stability; Dynamical response. MEMS; Micro rotor; Micro gas bearing; Velocity slip; Mechanical performance; Stability; Dynamical response.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Huang, H.; Meng, G.; Chen, J. Investigations of Slip Effect on the Performance of Micro Gas Bearings and Stability of Micro Rotor-Bearing Systems. Sensors 2007, 7, 1399-1414.

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