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Sensors 2008, 8(2), 700-710; doi:10.3390/s8020700

Micro Fluidic Channel Machining on Fused Silica Glass Using Powder Blasting

1
Department of Mechanical Engineering, University of Incheon, Incheon 402-749, Korea
2
Division of Mechanical Engineering, Inha University, Incheon 402-751, Korea
*
Author to whom correspondence should be addressed.
Received: 14 January 2008 / Accepted: 29 January 2008 / Published: 6 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

In this study, micro fluid channels are machined on fused silica glass via powder blasting, a mechanical etching process, and the machining characteristics of the channels are experimentally evaluated. In the process, material removal is performed by the collision of micro abrasives injected by highly compressed air on to the target surface. This approach can be characterized as an integration of brittle mode machining based on micro crack propagation. Fused silica glass, a high purity synthetic amorphous silicon dioxide, is selected as a workpiece material. It has a very low thermal expansion coefficient and excellent optical qualities and exceptional transmittance over a wide spectral range, especially in the ultraviolet range. The powder blasting process parameters affecting the machined results are injection pressure, abrasive particle size and density, stand-off distance, number of nozzle scanning, and shape/size of the required patterns. In this study, the influence of the number of nozzle scanning, abrasive particle size, and pattern size on the formation of micro channels is investigated. Machined shapes and surface roughness are measured using a 3-dimensional vision profiler and the results are discussed. View Full-Text
Keywords: Micro powder blasting; Fused silica glass; Micro Fluidic channel; Fuel cell; Lab-on-a- chip; Bio sensor Micro powder blasting; Fused silica glass; Micro Fluidic channel; Fuel cell; Lab-on-a- chip; Bio sensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Jang, H.-S.; Cho, M.-W.; Park, D.-S. Micro Fluidic Channel Machining on Fused Silica Glass Using Powder Blasting. Sensors 2008, 8, 700-710.

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