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Materials 2013, 6(4), 1543-1553; doi:10.3390/ma6041543

Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources

1
Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2
Semiconductor Lighting Technology Research and Development Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
*
Authors to whom correspondence should be addressed.
Received: 22 January 2013 / Revised: 28 February 2013 / Accepted: 14 March 2013 / Published: 16 April 2013
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Abstract

We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposition system (LPCVD). The GGNs are small plates with lateral sizes of around 100 nm and overlap each other, and are made up of nanosized multilayer graphene and graphitic carbon matrix (GCM). Long and straight SiC nanograins with hexagonal shapes, and with lateral sizes of around 200–400 nm are synthesized on the GGNs, which form compact SiC thin films. View Full-Text
Keywords: hexagonal columnar; silicon carbide; thin film; graphene; nanoflake; solid carbon; CVD hexagonal columnar; silicon carbide; thin film; graphene; nanoflake; solid carbon; CVD
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Liu, X.; Sun, G.; Liu, B.; Yan, G.; Guan, M.; Zhang, Y.; Zhang, F.; Chen, Y.; Dong, L.; Zheng, L.; Liu, S.; Tian, L.; Wang, L.; Zhao, W.; Zeng, Y. Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources. Materials 2013, 6, 1543-1553.

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