Next Article in Journal
Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching
Previous Article in Journal
Very High Throughput Electrical Cell Lysis and Extraction of Intracellular Compounds Using 3D Carbon Electrodes in Lab-on-a-Chip Devices
Article Menu

Export Article

Open AccessArticle
Micromachines 2012, 3(3), 582-603; doi:10.3390/mi3030582

Nonlinear Modeling for Distortion Analysis in Silicon Bulk-Mode Ring Resonators

Department of Electrical Engineering, Faculty of Engineering, Ferdowsi University of Mashhad (FUM), P.O. Box 91775-1111, Mashhad, Iran
*
Author to whom correspondence should be addressed.
Received: 6 July 2012 / Revised: 6 August 2012 / Accepted: 16 August 2012 / Published: 22 August 2012
View Full-Text   |   Download PDF [615 KB, uploaded 22 August 2012]   |  

Abstract

A distributed modeling approach has been developed to describe the dynamic behavior of ring resonators. The model includes the effect of large amplitudes around primary resonance frequencies, material and electrostatic nonlinearities. Through a combination of geometric and material nonlinearities, closed-form expression for third-order nonlinearity in mechanical stiffness of bulk-mode ring resonators is obtained. Moreover, to avoid dynamic pull-in instability, the choices of the quality factor, ac-drive and DC-bias voltages of the ring resonators, with a given geometry are limited by a resonant pull-in condition. Using the perturbation technique and the method of harmonic balance, the expressions for describing the effect of nonlinearities on the resonance frequency and displacement are derived. The results are discussed in detail, showing the effect of varying operating conditions and the quality factor on the harmonic distortions and third-order intermodulation distortion. The detailed nonlinear modeling and distortion analysis are applied as appropriate tools to design bulk-mode ring resonators with low motional resistance and high linearity.
Keywords: harmonic distortions; intermodulation distortion; micromechanical device; nonlinear system; perturbation method harmonic distortions; intermodulation distortion; micromechanical device; nonlinear system; perturbation method
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Bijari, A.; Keshmiri, S.-H.; Babazadeh, F. Nonlinear Modeling for Distortion Analysis in Silicon Bulk-Mode Ring Resonators. Micromachines 2012, 3, 582-603.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top