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Journal: Micromachines, 2013
Volume: 4
Number: 370

Article: Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography
Authors: by Luis Guillermo Villanueva, Oscar Vazquez-Mena, Cristina Martin-Olmos, Veronica Savu, Katrin Sidler and Juergen Brugger
Link: https://www.mdpi.com/2072-666X/4/4/370

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