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Journal: Micromachines, 2013
Volume: 4
Number: 431

Article: A Bi-Directional Out-of-Plane Actuator by Electrostatic Force
Authors: by Hao Ren, Weimin Wang, Fenggang Tao and Jun Yao
Link: https://www.mdpi.com/2072-666X/4/4/431

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