Reprint

Piezoelectric MEMS

Edited by
June 2016
176 pages
  • ISBN978-3-03897-005-7 (Paperback)
  • ISBN978-3-03897-006-4 (PDF)

This book is a reprint of the Special Issue Piezoelectric MEMS that was published in

Chemistry & Materials Science
Engineering
Physical Sciences
Format
  • Paperback
License
© 2018 by the authors; CC BY-NC-ND license
Keywords
acoustic gyroscope; Sagnac effect; phase difference; sound waves; angular velocity; sensitivity; piezoelectric micro-jet; ejection performance; modelling and simulation; micromanipulation; triple-finger; micro-gripper; piezoelectric actuator; hysteresis; rate-dependence; Prandtl-Ishlinskii; hybrid energy harvester; piezoelectric; electromagnetic; approximate distributed-parameter model; parametric analysis; micro-electromechanical system (MEMS); resonator; liquid sensing; piezoelectric; aluminium nitride (AlN); grape must fermentation; coupling analysis; fluid dynamic; piezoelectric micro-jet; flexure hinge; compliant bridge mechanisms; micro-motion scaling; kinematics; piezoelectric transducers; large stroke/high frequency vibrations; nonlinear duffing oscillator; artificial basilar membrane; cochlear implant; frequency selectivity; Archimedean spiral; aluminum nitride (AlN); piezoelectric cantilever; micro-electromechanical system (MEMS); finite element analysis; energy harvesting; transparent piezoelectrics; glass substrate; chemical solution deposition; piezoelectric actuators; hysteresis nonlinearity; Prandtl–Ishlinskii (PI) model; hysteresis compensation; micropolarization; microelectromechanical systems (MEMS); aluminum nitride; piezoelectric effect; cantilever; gyroscope; simulation; n/a