Reprint
State-of-the-Art CMOS and MEMS Devices
Edited by
April 2024
168 pages
- ISBN978-3-7258-0842-7 (Hardback)
- ISBN978-3-7258-0841-0 (PDF)
This is a Reprint of the Special Issue State-of-the-Art CMOS and MEMS Devices that was published in
Chemistry & Materials Science
Engineering
Physical Sciences
Summary
This Special Issue, titled “State-of-the-Art CMOS and MEMS Devices”, presents critical research progress on advanced CMOS ICs and MEMS devices. This Special Issue contains 10 published articles that address the urgent demand for high-performance silicon ICs and MEMS devices; these articles aim to further advance the field through extensive explorations of device and circuit design techniques, performance optimization methods, and system integration strategies.