Ultrafast Laser Fabrication for Lab-on-a-Chip

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (20 December 2016) | Viewed by 64144

Special Issue Editors


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Guest Editor
Istituto di Fotonica e Nanotecnologie, CNR & Dipartimento di Fisica Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milan, Italy
Interests: femtosecond laser micromachining; optofluidic devices; quantum photonic

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Guest Editor
Institute for Photonics and Nanotechnologies, CNR, Piazza Leonardo da Vinci 32, 20133 Milano, Italy
Interests: femtosecond laser micromachining; integrated optics; optofluidics; lab on a chip
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Special Issue Information

Dear Colleagues,

Femtosecond lasers are becoming powerful tools for the prototyping and fabrication of lab-on-a-chip devices. The process involves the use of extremely short pulses (~10−13 s) of light that are focused inside the volume of a transparent material. Due to the extremely high irradiance, nonlinear absorption is induced and, as a consequence, a permanent modification of the material, just in the focal region, is produced. Translating the substrate in three dimensions, it is possible to directly inscribe arbitrary structures within the volume of the material, which is one of the most interesting capability of the technique if compared with traditional microfrabrication technologies. It is also a highly versatile tool, as it can modify a huge number of different materials with high accuracy. Moreover, under suitable conditions it allows to inscribe inside the same substrate both microfluidic networks and photonic components for sample analysis and manipulation, giving highly integrated lab-on-a-chip. Accordingly, this Special Issue aims to highlight the latest achievements in femtosecond-laser-fabrication of microfluidic devices and optical components. It seeks to showcase research papers, short communications, and review articles that focus on advanced femtosecond laser inscription procedures and innovative devices with applications to microfluidics and lab-on-a-chip.

Prof. Dr. Roberto Osellame
Dr. Rebeca Martínez Vázquez
Guest Editors

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Keywords

  • ultrafast laser inscription
  • FLICE
  • microfluidics
  • lab-on-a-chip
  • optofluidics

Published Papers (10 papers)

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Editorial

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2 pages, 176 KiB  
Editorial
Editorial for the Special Issue on Ultrafast Laser Fabrication for Lab-on-a-Chip
by Rebeca Martínez Vázquez and Roberto Osellame
Micromachines 2018, 9(1), 38; https://doi.org/10.3390/mi9010038 - 18 Jan 2018
Viewed by 2455
Abstract
Ultrafast laser microfabrication is a very powerful method for producing integrated devices in transparent materials [1].[...] Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)

Research

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3911 KiB  
Article
Rapid Prototyping of Plastic Lab-on-a-Chip by Femtosecond Laser Micromachining and Removable Insert Microinjection Molding
by Rebeca Martínez Vázquez, Gianluca Trotta, Annalisa Volpe, Giuseppe Bernava, Vito Basile, Melania Paturzo, Pietro Ferraro, Antonio Ancona, Irene Fassi and Roberto Osellame
Micromachines 2017, 8(11), 328; https://doi.org/10.3390/mi8110328 - 07 Nov 2017
Cited by 22 | Viewed by 5058
Abstract
We have introduced a new hybrid fabrication method for lab-on-a-chip devices through the combination of femtosecond laser micromachining and removable insert micro-injection molding. This method is particularly suited for the fast prototyping of new devices, while maintaining a competitive low cost. To demonstrate [...] Read more.
We have introduced a new hybrid fabrication method for lab-on-a-chip devices through the combination of femtosecond laser micromachining and removable insert micro-injection molding. This method is particularly suited for the fast prototyping of new devices, while maintaining a competitive low cost. To demonstrate the effectiveness of our approach, we designed, fabricated, and tested a completely integrated flow cytometer coupled to a portable media device. The system operation was tested with fluorescent plastic micro-bead solutions ranging from 100 beads/μL to 500 beads/μL. We demonstrated that this hybrid lab-on-a-chip fabrication technology is suitable for producing low-cost and portable biological microsystems and for effectively bridging the gap between new device concepts and their mass production. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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1653 KiB  
Article
Nearly Aberration-Free Multiphoton Polymerization into Thick Photoresist Layers
by Bence Horváth, Pál Ormos and Lóránd Kelemen
Micromachines 2017, 8(7), 219; https://doi.org/10.3390/mi8070219 - 13 Jul 2017
Cited by 15 | Viewed by 4325
Abstract
In the era of lab-on-chip (LOC) devices, two-photon polymerization (TPP) is gaining more and more interest due to its capability of producing micrometer-sized 3D structures. With TPP, one may integrate functional structures into microfluidic systems by polymerizing them directly inside microchannels. When the [...] Read more.
In the era of lab-on-chip (LOC) devices, two-photon polymerization (TPP) is gaining more and more interest due to its capability of producing micrometer-sized 3D structures. With TPP, one may integrate functional structures into microfluidic systems by polymerizing them directly inside microchannels. When the feature of sub-micrometer size is a requirement, it is necessary to use high numerical aperture (NA) oil-immersion objectives that are optimized to work close to the glass substrate-photoresist interface. Further away from the substrate, that is, a few tens of micrometers into the photoresist, the focused beam undergoes focal spot elongation and focal position shift. These effects may eventually reduce the quality of the polymerized structures; therefore, it is desirable to eliminate them. We introduce a method that can highly improve the quality of structures polymerized tens of micrometers away from the substrate-photoresist interface by an oil-immersion, high NA objective. A spatial light-modulator is used to pre-compensate the phase-front distortion introduced by the interfacial refractive index jump on the strongly converging beam. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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5934 KiB  
Article
Lithium Niobate Micromachining for the Fabrication of Microfluidic Droplet Generators
by Giacomo Bettella, Gianluca Pozza, Sebastian Kroesen, Riccardo Zamboni, Enrico Baggio, Carlo Montevecchi, Annamaria Zaltron, Ludovic Gauthier-Manuel, Giampaolo Mistura, Claudio Furlan, Mathieu Chauvet, Cornelia Denz and Cinzia Sada
Micromachines 2017, 8(6), 185; https://doi.org/10.3390/mi8060185 - 09 Jun 2017
Cited by 18 | Viewed by 5888
Abstract
In this paper, we present the first microfluidic junctions for droplet generation directly engraved on lithium niobate crystals by micromachining techniques, preparatory to a fully integrated opto-microfluidics lab-on-chip system. In particular, laser ablation technique and the mechanical micromachining technique are exploited to realise [...] Read more.
In this paper, we present the first microfluidic junctions for droplet generation directly engraved on lithium niobate crystals by micromachining techniques, preparatory to a fully integrated opto-microfluidics lab-on-chip system. In particular, laser ablation technique and the mechanical micromachining technique are exploited to realise microfluidic channels in T- and cross junction configurations. The quality of both lateral and bottom surfaces of the channels are therefore compared together with a detailed study of their roughness measured by means of atomic force microscopy in order to evaluate the final performance achievable in an optofluidic device. Finally, the microfluidics performances of these water-in-oil droplets generators are investigated depending on these micromachining techniques, with particular focus on a wide range of droplet generation rates. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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3949 KiB  
Article
Selective Laser-Induced Etching of 3D Precision Quartz Glass Components for Microfluidic Applications—Up-Scaling of Complexity and Speed
by Jens Gottmann, Martin Hermans, Nikolai Repiev and Jürgen Ortmann
Micromachines 2017, 8(4), 110; https://doi.org/10.3390/mi8040110 - 01 Apr 2017
Cited by 96 | Viewed by 9933
Abstract
By modification of glasses with ultrafast laser radiation and subsequent wet-chemical etching (here named SLE = selective laser-induced etching), precise 3D structures have been produced, especially in quartz glass (fused silica), for more than a decade. By the combination of a three-axis system [...] Read more.
By modification of glasses with ultrafast laser radiation and subsequent wet-chemical etching (here named SLE = selective laser-induced etching), precise 3D structures have been produced, especially in quartz glass (fused silica), for more than a decade. By the combination of a three-axis system to move the glass sample and a fast 3D system to move the laser focus, the SLE process is now suitable to produce more complex structures in a shorter time. Here we present investigations which enabled the new possibilities. We started with investigations of the optimum laser parameters to enable high selective laser-induced etching: surprisingly, not the shortest pulse duration is best suited for the SLE process. Secondly we investigated the scaling of the writing velocity: a faster writing speed results in higher selectivity and thus higher precision of the resulting structures, so the SLE process is now even suitable for the mass production of 3D structures. Finally we programmed a printer driver for commercial CAD software enabling the automated production of complex 3D glass parts as new examples for lab-on-a-chip applications such as nested nozzles, connectors and a cell-sorting structure. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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789 KiB  
Article
Laser Fabrication of Miniature Internal Thread in Glass Substrate
by Hiroyuki Degawa, Noriaki Urano and Shigeki Matsuo
Micromachines 2017, 8(2), 48; https://doi.org/10.3390/mi8020048 - 08 Feb 2017
Cited by 7 | Viewed by 5099
Abstract
Miniature internal threads (tapped holes) of S0.5 were fabricated in a glass substrate. Water-assisted laser drilling was applied for fabrication of the threads of S0.5 standard using a subnanosecond laser as a light source. The landscape of the inner surface of the threads [...] Read more.
Miniature internal threads (tapped holes) of S0.5 were fabricated in a glass substrate. Water-assisted laser drilling was applied for fabrication of the threads of S0.5 standard using a subnanosecond laser as a light source. The landscape of the inner surface of the threads was measured by a laser microscope, and showed reasonable agreement with the desired standard. As a proof of concept, a commercial external screw was fitted to the fabricated internal thread. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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2858 KiB  
Article
Magnetically Driven Micromachines Created by Two-Photon Microfabrication and Selective Electroless Magnetite Plating for Lab-on-a-Chip Applications
by Tommaso Zandrini, Shuhei Taniguchi and Shoji Maruo
Micromachines 2017, 8(2), 35; https://doi.org/10.3390/mi8020035 - 24 Jan 2017
Cited by 22 | Viewed by 6028
Abstract
We propose a novel method to fabricate three-dimensional magnetic microparts, which can be integrated in functional microfluidic networks and lab-on-a-chip devices, by the combination of two-photon microfabrication and selective electroless plating. In our experiments, magnetic microparts could be successfully fabricated by optimizing various [...] Read more.
We propose a novel method to fabricate three-dimensional magnetic microparts, which can be integrated in functional microfluidic networks and lab-on-a-chip devices, by the combination of two-photon microfabrication and selective electroless plating. In our experiments, magnetic microparts could be successfully fabricated by optimizing various experimental conditions of electroless plating. In addition, energy dispersive X-ray spectrometry (EDS) clarified that iron oxide nanoparticles were deposited onto the polymeric microstructure site-selectively. We also fabricated magnetic microrotors which could smoothly rotate using common laboratory equipment. Since such magnetic microparts can be remotely driven with an external magnetic field, our fabrication process can be applied to functional lab-on-a-chip devices for analytical and biological applications. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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Review

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6075 KiB  
Review
Two-Photon Polymerization Metrology: Characterization Methods of Mechanisms and Microstructures
by Christopher N. LaFratta and Tommaso Baldacchini
Micromachines 2017, 8(4), 101; https://doi.org/10.3390/mi8040101 - 27 Mar 2017
Cited by 71 | Viewed by 9583
Abstract
The ability to create complex three-dimensional microstructures has reached an unprecedented level of sophistication in the last 15 years. For the most part, this is the result of a steady development of the additive manufacturing technique named two-photon polymerization (TPP). In a short [...] Read more.
The ability to create complex three-dimensional microstructures has reached an unprecedented level of sophistication in the last 15 years. For the most part, this is the result of a steady development of the additive manufacturing technique named two-photon polymerization (TPP). In a short amount of time, TPP has gone from being a microfabrication novelty employed largely by laser specialists to a useful tool in the hands of scientists and engineers working in a wide range of research fields including microfluidics. When used in combination with traditional microfabrication processes, TPP can be employed to add unique three-dimensional components to planar platforms, thus enabling the realization of lab-on-a-chip solutions otherwise impossible to create. To take full advantage of TPP, an in-depth understanding is required of the materials photochemistry and the fabricated microstructures’ mechanical and chemical properties. Thus, we review methods developed so far to investigate the underling mechanism involved during TPP and analytical methods employed to characterize TPP microstructures. Furthermore, we will discuss potential opportunities for using optofluidics and lab-on-a-chip systems for TPP metrology. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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6173 KiB  
Review
Internal Laser Writing of High-Aspect-Ratio Microfluidic Structures in Silicate Glasses for Lab-on-a-Chip Applications
by Ya Cheng
Micromachines 2017, 8(2), 59; https://doi.org/10.3390/mi8020059 - 16 Feb 2017
Cited by 24 | Viewed by 6579
Abstract
Femtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly [...] Read more.
Femtosecond laser direct writing is unique in allowing for fabrication of 3D micro- and nanofluidic structures, thereby enabling rapid and efficient manipulation of fluidic dynamics in 3D space to realize innovative functionalities. Here, I discuss the challenges in producing fully functional and highly integrated 3D micro- and nanofluidic systems with potential applications ranging from chemical and biological analyses to investigations of nanofluidic behaviors. In particular, I review the achievements we have made in the past decade, which have led to 3D microchannels with controllable cross-sectional profiles and large aspect ratios, 3D nanofluidic channels with widths of several tens of nanometers, and smooth inner walls with roughness on the order of ~1 nm. Integration of the microfluidics with other functional microcomponents including microoptics and microelectrodes will also be discussed, followed by conclusions and the future perspective. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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2757 KiB  
Review
Ultrafast Laser Fabrication of Functional Biochips: New Avenues for Exploring 3D Micro- and Nano-Environments
by Felix Sima, Jian Xu, Dong Wu and Koji Sugioka
Micromachines 2017, 8(2), 40; https://doi.org/10.3390/mi8020040 - 28 Jan 2017
Cited by 20 | Viewed by 7901
Abstract
Lab-on-a-chip biological platforms have been intensively developed during the last decade since emerging technologies have offered possibilities to manufacture reliable devices with increased spatial resolution and 3D configurations. These biochips permit testing chemical reactions with nanoliter volumes, enhanced sensitivity in analysis and reduced [...] Read more.
Lab-on-a-chip biological platforms have been intensively developed during the last decade since emerging technologies have offered possibilities to manufacture reliable devices with increased spatial resolution and 3D configurations. These biochips permit testing chemical reactions with nanoliter volumes, enhanced sensitivity in analysis and reduced consumption of reagents. Due to the high peak intensity that allows multiphoton absorption, ultrafast lasers can induce local modifications inside transparent materials with high precision at micro- and nanoscale. Subtractive manufacturing based on laser internal modification followed by wet chemical etching can directly fabricate 3D micro-channels in glass materials. On the other hand, additive laser manufacturing by two-photon polymerization of photoresists can grow 3D polymeric micro- and nanostructures with specific properties for biomedical use. Both transparent materials are ideal candidates for biochips that allow exploring phenomena at cellular levels while their processing with a nanoscale resolution represents an excellent opportunity to get more insights on biological aspects. We will review herein the laser fabrication of transparent microfluidic and optofluidic devices for biochip applications and will address challenges associated with their potential. In particular, integrated micro- and optofluidic systems will be presented with emphasis on the functionality for biological applications. It will be shown that ultrafast laser processing is not only an instrument that can tailor appropriate 3D environments to study living microorganisms and to improve cell detection or sorting but also a tool to fabricate appropriate biomimetic structures for complex cellular analyses. New advances open now the avenue to construct miniaturized organs of desired shapes and configurations with the goal to reproduce life processes and bypass in vivo animal or human testing. Full article
(This article belongs to the Special Issue Ultrafast Laser Fabrication for Lab-on-a-Chip)
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