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Micromachines
Special Issues
State-Of-The-Art Micromachining
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State-Of-The-Art Micromachining

A special issue of Micromachines (ISSN 2072-666X).

Deadline for manuscript submissions: closed (31 May 2017) | Viewed by 41326

Special Issue Editors

Prof. Dr. Mustafizur Rahman

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Guest Editor
Department of Mechanical Engineering, National University of Singapore, Singapore 119260, Singapore
Interests: manufacturing; micromachining; nano machining; machine tools
Dr. Tanveer Saleh

E-Mail Website
Guest Editor
Department of Mechatronics Engineering, International Islamic University Malaysia, Jalan Gombak, 53100 Kuala Lumpur, Malaysia
Interests: automation; smart material; MEMS; carbon nanotube forest; rehabilitation robotics
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Nowadays, there is a predominant trend in miniaturization of products in various fields of study such as information technology, biotechnology, environmental and medical science. Micromachining technology has been playing a crucial role in the miniaturization of products. It has vast application in the field of sensors, photovoltaics, drug delivery, microfluidics, micro mold fabrication, etc. This type of machining process can be realized in various ways which can be categorized into two major classes, namely beam-based and tool-based.  Beam-based micromachining uses laser beams, electron beams or ion beams for material removal. On the other hand, tool-based micromachining uses solid tools as the cutting element for the material removal process. Tool based micromachining can be further divided into conventional and non-conventional machining processes. Some of the examples of conventional machining processes are micro milling, micro drilling, and micro turning. Whereas, micro electro discharge machining (EDM) and micro electrochemical machining (ECM) are examples of non-conventional machining processes. Both tool-based and beam-based micromachining technologies have their own merits and demerits. Micromachining has evolved quickly in recent years. The aim of this thematic issue is to focus on the recent advances in micromachining using both tool based and beam based methods. Topics to be covered but not limited to are as follows:

  • Lithography
  • Fused beam machining
  • Electron beam machining
  • Micro electro-discharge machining
  • Micro turning
  • Micro grinding
  • Micro milling
  • Micro electro-chemical etching
  • Nano-imprint,
  • Contact printing,
  • Stencil based patterning
  • Scanning probe-based patterning

Prof. Dr. Mustafizur Rahman
Dr. Tanveer Saleh
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Published Papers (6 papers)

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Research

15183 KiB  
Article
Application of Ultra-Small Micro Grinding and Micro Milling Tools: Possibilities and Limitations
by Benjamin Kirsch, Martin Bohley, Peter A. Arrabiyeh and Jan C. Aurich
Micromachines 2017, 8(9), 261; https://doi.org/10.3390/mi8090261 - 24 Aug 2017
Cited by 35 | Viewed by 8792
Abstract
Current demands for flexible, individual microstructures in high quality result in high requirements for micro tools. As the tool size defines the minimum structure size, ultra-small tools are needed. To achieve tool diameters of 50 µm and lower, we investigate the complete manufacturing [...] Read more.
Current demands for flexible, individual microstructures in high quality result in high requirements for micro tools. As the tool size defines the minimum structure size, ultra-small tools are needed. To achieve tool diameters of 50 µm and lower, we investigate the complete manufacturing chain of micro machining. From the development of the machine tools and components needed to produce and apply the micro tools, the micro tools themselves, as well as the micro machining processes. Machine tools are developed with the possibility of producing the micro geometry (cutting edge design) of micro tools as well as plating processes to produce super abrasive micro grinding tools. Applying these setups, we are able to produce ultra-small micro grinding and micro milling tools with typical diameters of 50 µm and down to 4 µm. However, the application of such tools is very challenging. The article presents possibilities and limitations in manufacturing the micro tools themselves as well as microstructures made with these tools. A special emphasis will be on the influence of the tool substrate in micro milling and grain sizes in micro grinding. Full article
(This article belongs to the Special Issue State-Of-The-Art Micromachining)
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2677 KiB  
Article
Study on the Optimum Cutting Parameters of an Aluminum Mold for Effective Bonding Strength of a PDMS Microfluidic Device
by Caffiyar Mohamed Yousuff, Mohd. Danish, Eric Tatt Wei Ho, Ismail Hussain Kamal Basha and Nor Hisham B. Hamid
Micromachines 2017, 8(8), 258; https://doi.org/10.3390/mi8080258 - 22 Aug 2017
Cited by 30 | Viewed by 6057
Abstract
Master mold fabricated using micro milling is an easy way to develop the polydimethylsiloxane (PDMS) based microfluidic device. Achieving high-quality micro-milled surface is important for excellent bonding strength between PDMS and glass slide. The aim of our experiment is to study the optimal [...] Read more.
Master mold fabricated using micro milling is an easy way to develop the polydimethylsiloxane (PDMS) based microfluidic device. Achieving high-quality micro-milled surface is important for excellent bonding strength between PDMS and glass slide. The aim of our experiment is to study the optimal cutting parameters for micro milling an aluminum mold insert for the production of a fine resolution microstructure with the minimum surface roughness using conventional computer numerical control (CNC) machine systems; we also aim to measure the bonding strength of PDMS with different surface roughnesses. Response surface methodology was employed to optimize the cutting parameters in order to obtain high surface smoothness. The cutting parameters were demonstrated with the following combinations: 20,000 rpm spindle speed, 50 mm/min feed rate, depth of cut 5 µm with tool size 200 µm or less; this gives a fine resolution microstructure with the minimum surface roughness and strong bonding strength between PDMS–PDMS and PDMS–glass. Full article
(This article belongs to the Special Issue State-Of-The-Art Micromachining)
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2105 KiB  
Article
Squeeze Film Air Damping in Tapping Mode Atomic Force Microscopy
by Yang Zhao, Qiangxian Huang, Liansheng Zhang, Yong Zhang and Rongjun Cheng
Micromachines 2017, 8(7), 226; https://doi.org/10.3390/mi8070226 - 20 Jul 2017
Cited by 7 | Viewed by 4731
Abstract
In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and [...] Read more.
In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce squeeze film air damping from the air in the gap. This damping can cause variations in the cantilever’s vibrating parameters and affect the accuracy of the nanoscale patterning depth. In this paper, squeeze film air damping was modeled and analyzed considering the inclined angle between the cantilever and the sample surface, and its effects on the resonant amplitude and damping coefficient of the cantilever were discussed. The squeeze film air damping in the approaching curve of cantilever was observed, and its effect on fabricating nanopatterns was discussed. Full article
(This article belongs to the Special Issue State-Of-The-Art Micromachining)
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31179 KiB  
Article
Research on the Drilling Performance of a Helical Point Micro Drill with Different Geometry Parameters
by Zhiqiang Liang, Suyan Zhang, Xibin Wang, Haixin Guo, Tianfeng Zhou, Li Jiao and Pei Yan
Micromachines 2017, 8(7), 208; https://doi.org/10.3390/mi8070208 - 29 Jun 2017
Cited by 4 | Viewed by 6554
Abstract
During the micro-drilling process of stainless steel, the wear, fracture, and breakage of the micro-drill easily occur. Micro-drill geometry parameters have significant influence on the drilling performance of the micro-drill. Nowadays, the helical point micro-drill is proposed and its improved drilling performance is [...] Read more.
During the micro-drilling process of stainless steel, the wear, fracture, and breakage of the micro-drill easily occur. Micro-drill geometry parameters have significant influence on the drilling performance of the micro-drill. Nowadays, the helical point micro-drill is proposed and its improved drilling performance is validated by some researchers. In this study, to analyze the effect of geometry parameters of the helical point micro-drill on drilling performance, the mathematical models of the helical flank and ground flute are proposed, and the cutting lip shape, rake angle, and uncut chip thickness are calculated using MATLAB software. Then, based on the orthogonal tests, nine kinds of micro-drills with different point angles, web thicknesses, and helix angles are fabricated using a six-axis CNC tool grinder, and micro-drilling experiments on 1Cr18Ni9Ti stainless steel are carried out. The drilling force, the burr height, and the hole wall quality are measured and observed. The results show that the point angle is the main contributing factor for the thrust force and burr height, and the web thickness is the main contributing factor for the micro hole wall quality. The increased point angle offers a larger thrust force, but gives rise to a smaller exit burr. A larger web thickness leads to a larger thrust force and burr height, and results in a poor surface quality. With the helix angle increased, the thrust force and burr height decreases, and the surface quality of micro-hole improves. The geometry parameters with a point angle 70°, a point angle of 40°, and web thickness ratio of 0.2 can used to improve the drilling performance of the helical point micro-drill. Full article
(This article belongs to the Special Issue State-Of-The-Art Micromachining)
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2344 KiB  
Article
Modeling the Influence of Tool Deflection on Cutting Force and Surface Generation in Micro-Milling
by Dehong Huo, Wanqun Chen, Xiangyu Teng, Chao Lin and Kai Yang
Micromachines 2017, 8(6), 188; https://doi.org/10.3390/mi8060188 - 17 Jun 2017
Cited by 37 | Viewed by 7795
Abstract
In micro-milling, cutting forces generate non-negligible tool deflection, which has a significant influence on the machining process and on workpiece accuracy. This paper investigates the tool deflection during micro-milling and its effect on cutting force and surface generation. The distribution of cutting forces [...] Read more.
In micro-milling, cutting forces generate non-negligible tool deflection, which has a significant influence on the machining process and on workpiece accuracy. This paper investigates the tool deflection during micro-milling and its effect on cutting force and surface generation. The distribution of cutting forces acting on the tool is calculated with a mathematical model that considers tool elasticity and runout, and the tool deflection caused by the cutting forces is then obtained. Furthermore, an improved cutting force model and side wall surface generation model are established, including the tool deflection effect. Both cutting force and surface simulation models were verified by the micro-end-milling experiment, and the results show a very good agreement between the simulation and experiments. Full article
(This article belongs to the Special Issue State-Of-The-Art Micromachining)
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8181 KiB  
Article
Rapid Prototyping of a Micromotor with an Optical Rotary Encoder
by Da-Chen Pang and Yi-Wei Lai
Micromachines 2017, 8(6), 174; https://doi.org/10.3390/mi8060174 - 02 Jun 2017
Cited by 8 | Viewed by 6183
Abstract
This study proposed a rapid prototyping fabrication method for micromotors that allowed us to develop both 1 mm and 1.5 mm diameter permanent-magnet synchronous motors (PMSMs) with an optical rotary encoder. First, an integrated electroforming method was proposed for combining stator housing and [...] Read more.
This study proposed a rapid prototyping fabrication method for micromotors that allowed us to develop both 1 mm and 1.5 mm diameter permanent-magnet synchronous motors (PMSMs) with an optical rotary encoder. First, an integrated electroforming method was proposed for combining stator housing and flexible print circuit (FPC) coils to ease the manufacturing and assembly of micromotor components. This is particularly useful in the production of prototypes or small volumes of units. Second, an optical encoder was used to detect the rotational angle by means of a reflective code disk, an optical fiber, and a photo-detector. The micromotor was built with a code disk and an optical fiber. The code disk was designed to match the optical fiber and was made by photolithography and sputtering. Both the 1 mm and 1.5 mm diameter motors successfully achieved a rotational speed over 20,000 RPM and due to a 50 µm diameter optical fiber core, the encoders showed a resolution of 12 and 18 pulses per revolution (PPR), respectively. Full article
(This article belongs to the Special Issue State-Of-The-Art Micromachining)
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