Micromachined Flow Sensors
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: closed (1 September 2019) | Viewed by 4045
Special Issue Editors
Interests: mechanical microsensors; electronic interfacing of sensors; sensor packaging; force sensors; flow sensors; inertial sensors
Special Issues, Collections and Topics in MDPI journals
2. Bronkhorst High-Tech BV, Nijverheidsstraat 1A, 7261 AK Ruurlo, The Netherlands
Interests: design, modeling, fabrication and application of microfluidic handling systems; MEMS thermal and Coriolis flow sensors and controllers; MEMS pressure sensors; MEMS control valves; micromachined flow analysis systems; multiparameter flow measurement systems; micro Wobbe index meters
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Since the publication of the first micromachined flow sensors in the 1970s, there has been a tremendous development. Whereas the first sensors were mostly based on thermal sensing principles, we now see a large range of different operating principles: Thermal, anemometric, calorimetric, time-of-flight, measuring pressure drop along a channel or over an orifice, measuring drag force at a channel wall or on an obstacle in the flow, and, more recently, also sensors based on Coriolis forces and ultrasonic measurements. Combining different sensor principles on a single chip allows the measurement of fluid parameters, such as density and viscosity. With increasingly smaller flow levels, the characterization and calibration of sensors also becomes a challenge.
This Special Issue covers the recent advances in all aspects of micro flow sensor research, including design and fabrication of the sensor chips, physical working principles, modeling and simulation, and the measurement setups for their characterization and calibration.
Dr. Remco Wiegerink
Prof. Dr. Joost Lötters
Guest Editors
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Keywords
- Flow sensors
- Fluid parameter sensors
- Flow sensor characterization and calibration
- Measurement of extremely small flows
