Effects and Mechanism of Surface Water Wettability and Operating Frequency on Response Linearity of Flexible IDE Capacitive Humidity Sensor
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication of Flexible IDE Capacitive Humidity Sensor
2.2. Measurement of Humidity Response and Analysis of Response Linearity
2.3. FEM Simulation of IDE Capacitive Humidity Sensor
3. Results and Discussion
3.1. Effect of Surface Water Wettability and Operating Frequency on Response Linearity
3.2. Effects of Surface Water Droplets on Sensor Capacitance
3.3. Mechanism for the Effects of Surface Water Wettability and Operating Frequency
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Surface | Before Surface Treatment | After UVO Irradiation | After SAM Coating |
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PET | | | |
Ag | | | |
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Yang, W.S.; Han, S.; Lim, G.-R.; Kim, H.Y.; Hong, S.-H. Effects and Mechanism of Surface Water Wettability and Operating Frequency on Response Linearity of Flexible IDE Capacitive Humidity Sensor. Sensors 2021, 21, 6633. https://doi.org/10.3390/s21196633
Yang WS, Han S, Lim G-R, Kim HY, Hong S-H. Effects and Mechanism of Surface Water Wettability and Operating Frequency on Response Linearity of Flexible IDE Capacitive Humidity Sensor. Sensors. 2021; 21(19):6633. https://doi.org/10.3390/s21196633
Chicago/Turabian StyleYang, Woo Seok, Seungoh Han, Gyu-Ri Lim, Hyun You Kim, and Sung-Hoon Hong. 2021. "Effects and Mechanism of Surface Water Wettability and Operating Frequency on Response Linearity of Flexible IDE Capacitive Humidity Sensor" Sensors 21, no. 19: 6633. https://doi.org/10.3390/s21196633