Near-Ultrasonic Transfer Function and SNR of Differential MEMS Microphones Suitable for Photoacoustics
Abstract
:1. Introduction
2. Materials and Methods
2.1. Materials
2.2. Methods
3. Results
3.1. Transfer Function
3.2. Signal-to-Noise Ratio
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Manufacturer | Model | Sensitivity in dBV | SNR in dBV/Pa |
---|---|---|---|
Infineon | IM73A135V01 | −38.0 | 73.0 |
TDK Invensense | ICS40740 | −37.5 | 70.0 |
Knowles | Lazarus PH18C3LM4H-1 | −38.0 | 68.5 |
Knowles | Ellen SPW0878LR5H-1 | −38.0 | 65.0 |
Microphone | Frequency in kHz | |
---|---|---|
First Resonance | Higher Resonances | |
IM73A135V01 | 28 | 40/57 |
ICS40740 | 20 | 40/55 |
Lazarus | 33 | 48/55 |
Ellen | 37 | 48/55 |
Microphone | 20 kHz | 40 kHz | 75 kHz | |||
---|---|---|---|---|---|---|
IM73A135V01 | −16.34 | −25.35 | −17.94 | −23.31 | −10.16 | −19.97 |
ICS40740 | −19.88 | −17.12 | −16.14 | −24.28 | −24.64 | −32.72 |
Ellen | −25.72 | −30.94 | −15.14 | −19.33 | −15.03 | −26.67 |
Lazarus | −16.90 | −26.50 | −12.03 | −18.53 | −18.47 | −29.40 |
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Falkhofen, J.; Wolff, M. Near-Ultrasonic Transfer Function and SNR of Differential MEMS Microphones Suitable for Photoacoustics. Sensors 2023, 23, 2774. https://doi.org/10.3390/s23052774
Falkhofen J, Wolff M. Near-Ultrasonic Transfer Function and SNR of Differential MEMS Microphones Suitable for Photoacoustics. Sensors. 2023; 23(5):2774. https://doi.org/10.3390/s23052774
Chicago/Turabian StyleFalkhofen, Judith, and Marcus Wolff. 2023. "Near-Ultrasonic Transfer Function and SNR of Differential MEMS Microphones Suitable for Photoacoustics" Sensors 23, no. 5: 2774. https://doi.org/10.3390/s23052774