Open-Path Cavity Ring-Down Spectroscopy for Simultaneous Detection of Hydrogen Chloride and Particles in Cleanroom Environment
Abstract
:1. Introduction
2. Overview of Cavity Ring-Down Spectroscopy (CRDS)
3. Experimental Methods
3.1. AMC and PM Testbed Chamber
3.2. Open-Path CRDS Instrument for HCl and PM Detection
4. Results and Discussion
4.1. Stability of HCl Detection
4.2. Particle Detection
5. Conclusions and Future Work
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Khan, M.B.; L’Orange, C.; Lim, C.; Kwon, D.; Yalin, A.P. Open-Path Cavity Ring-Down Spectroscopy for Simultaneous Detection of Hydrogen Chloride and Particles in Cleanroom Environment. Sensors 2024, 24, 5611. https://doi.org/10.3390/s24175611
Khan MB, L’Orange C, Lim C, Kwon D, Yalin AP. Open-Path Cavity Ring-Down Spectroscopy for Simultaneous Detection of Hydrogen Chloride and Particles in Cleanroom Environment. Sensors. 2024; 24(17):5611. https://doi.org/10.3390/s24175611
Chicago/Turabian StyleKhan, Muhammad Bilal, Christian L’Orange, Cheongha Lim, Deokhyeon Kwon, and Azer P. Yalin. 2024. "Open-Path Cavity Ring-Down Spectroscopy for Simultaneous Detection of Hydrogen Chloride and Particles in Cleanroom Environment" Sensors 24, no. 17: 5611. https://doi.org/10.3390/s24175611