The pH Sensing Properties of RF Sputtered RuO2 Thin-Film Prepared Using Different Ar/O2 Flow Ratio
Abstract
:1. Introduction
2. Sensor Fabrication and Measurements
2.1. Sensor Fabrication
2.2. pH Measurement
3. Results and Discussion
3.1. pH Sensing Mechanism
3.2. Reactive Sputtering Model
3.3. pH Sensor Performance
3.3.1. Sensitivity
Ar/O2 gas ratio (sccm) | Sensitivity (mV/pH) | Resolution (pH/mV) | Linearity |
---|---|---|---|
10/0 | 64.33 | 0.015 | r2 = 0.9964 |
9/1 | 72.50 | 0.013 | r2 = 0.9985 |
8/2 | 69.83 | 0.014 | r2 = 0.9984 |
7/3 | 73.83 | 0.013 | r2 = 0.9983 |
3.3.2. Response Time
Ar/O2 gas ratio (sccm) | Response time (s) | ||
---|---|---|---|
pH 4 | pH 7 | pH 10 | |
10/0 | 3 | 3 | 160 |
9/1 | 3 | 3 | 60 |
8/2 | 3 | 3 | 3 |
7/3 | 3 | 3 | 3 |
3.3.3. Stability
3.3.4. Reversibility and Hysteresis
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Sardarinejad, A.; Maurya, D.K.; Alameh, K. The pH Sensing Properties of RF Sputtered RuO2 Thin-Film Prepared Using Different Ar/O2 Flow Ratio. Materials 2015, 8, 3352-3363. https://doi.org/10.3390/ma8063352
Sardarinejad A, Maurya DK, Alameh K. The pH Sensing Properties of RF Sputtered RuO2 Thin-Film Prepared Using Different Ar/O2 Flow Ratio. Materials. 2015; 8(6):3352-3363. https://doi.org/10.3390/ma8063352
Chicago/Turabian StyleSardarinejad, Ali, Devendra Kumar Maurya, and Kamal Alameh. 2015. "The pH Sensing Properties of RF Sputtered RuO2 Thin-Film Prepared Using Different Ar/O2 Flow Ratio" Materials 8, no. 6: 3352-3363. https://doi.org/10.3390/ma8063352