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Journal: Micromachines, 2022
Volume: 13
Number: 102

Article: Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator
Authors: by Chao Gao, Yang Zou, Jie Zhou, Yan Liu, Wenjuan Liu, Yao Cai and Chengliang Sun
Link: https://www.mdpi.com/2072-666X/13/1/102

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