Development of a High-Sensitivity Acoustic Sensor Based on Grating Interferometer Combined with Glass Diaphragm
Abstract
:1. Introduction
2. Theory and Design Guidelines
2.1. Theory of Grating Interferometer-Based Sensor
2.2. Design Guidelines for the Interference Cavity
2.2.1. Static Deformation of the Diaphragm
2.2.2. The Incident Light Beam
2.2.3. Squeeze Film Damping
2.2.4. The Key Parameters
3. Design and Fabrication of the Acoustic Sensor
3.1. Structure of the Acoustic Sensor
3.2. Fabrication of the Device
- (a)
- The round diaphragm with the designed diameter was cut by a laser process from the thin glass substrate with the designed thickness. The laser process was direct-writing ablation by the focused laser beam with a 355 nm wavelength and 15 W power, and it was implemented by laser engraving equipment. The direction of the laser beam is adjusted according to the control program, focusing the laser spot on the surface of the substrate moved, while removing its material within a certain depth in the scanned area with high temperature. The laser process is mainly applied for cutting structures from the glass substrates in this fabrication process;
- (b)
- The 100 nm thick chromium (Cr) film was sputtered on the center of the diaphragm with a patterned glass plate covering its surface as the mask;
- (c)
- The grating with a 2.4 period was made by the micromachining process flow for preparing high-accuracy metal microstructures on the substrate. First, the 50 nm thick Cr film was sputtered on the glass wafer. Second, a photoresist mask containing a grating fringe pattern was obtained via a lithography process. Third, the Cr film was patterned by high-precision ion beam etching (IBE) processes with the photoresist mask. Finally, discrete square grating plates were cut from the fabricated wafer by the laser process, with the edges parallel or perpendicular to the grating fringe and a missing angle for marking the fringe direction;
- (d)
- The round substrate with the designed positioning edge and air vents were cut from another glass substrate by the laser process. Then, the grating plate was assembled on the center of the substrate by a low-temperature glass bonding process, with one of its edges parallel to the positioning edge of the substrate;
- (e)
- The glass diaphragm with reflective film, a glass ring cut by the laser process as the cavity sidewall, and the substrate with a grating were aligned and assembled by a low-temperature glass bonding process to obtain the glass-based interference component.
4. Results
4.1. The Test Methods
4.2. Response to the Acoustic Pressure
4.3. Low-Frequency Characteristic of the Glass-Based Sensor
5. Discussion
6. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
Appendix A
References
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Mechanism | Parameter | Expression | Effect |
---|---|---|---|
Deformation | Proportional to displacement | ||
Proportional to displacement | |||
Light dispersion | Proportional to reduction in interference intensity variation | ||
Squeeze film damping | Proportional to elastic damping | ||
Proportional to viscous damping |
Parameter | Expression | Sample 1 | Sample 2 | Silicon-Based Sample [9] |
---|---|---|---|---|
Diaphragm radius | 6.35 mm | 12.7 mm | 3 mm | |
Diaphragm thickness | ||||
Cavity length a | ||||
Incident light radius | 0.5 mm | 0.5 mm | 0.5 mm | |
Elastic coefficient for deformation | 2.93 × 107 | 4.95 × 107 | 2.99 × 105 | |
Parameter for incident light | 0.0062 | 0.0016 | 0.028 | |
Damping coefficients b ) | 4.73 × 104 | 7.6 × 105 | 8.58 × 108 | |
6.78 | 270.29 | 32,757 |
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Zhang, M.; Lu, C.; Zhao, Q.; Qi, Z.-M. Development of a High-Sensitivity Acoustic Sensor Based on Grating Interferometer Combined with Glass Diaphragm. Micromachines 2024, 15, 1097. https://doi.org/10.3390/mi15091097
Zhang M, Lu C, Zhao Q, Qi Z-M. Development of a High-Sensitivity Acoustic Sensor Based on Grating Interferometer Combined with Glass Diaphragm. Micromachines. 2024; 15(9):1097. https://doi.org/10.3390/mi15091097
Chicago/Turabian StyleZhang, Mengying, Chao Lu, Quanliang Zhao, and Zhi-Mei Qi. 2024. "Development of a High-Sensitivity Acoustic Sensor Based on Grating Interferometer Combined with Glass Diaphragm" Micromachines 15, no. 9: 1097. https://doi.org/10.3390/mi15091097