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Journal: Crystals, 2022
Volume: 12
Number: 1605
Article:
CVD Elaboration of 3C-SiC on AlN/Si Heterostructures: Structural Trends and Evolution during Growth
Authors:
by
Marc Portail, Eric Frayssinet, Adrien Michon, Stéphanie Rennesson, Fabrice Semond, Aimeric Courville, Marcin Zielinski, Remi Comyn, Luan Nguyen, Yvon Cordier and Philippe Vennéguès
Link:
https://www.mdpi.com/2073-4352/12/11/1605
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