Fabrication of Nanoscale Oxide Textured Surfaces on Polymers
Abstract
:1. Introduction
2. Experimental Details
2.1. Materials
2.2. Substrate Preparation
2.3. BCP Templates
2.4. Sequential Infiltration Synthesis
2.5. Passivation Process
2.6. Reactive Ion Etching
2.7. Characterizations
3. Results and Discussion
3.1. Process Overview
3.2. Room-Temperature BCP Assembly
3.2.1. Random Copolymer Mat Crosslinking Using UV Treatment
3.2.2. BCP Solvent Annealing
3.2.3. SIS on BCP/SiO2/MR-8 Polymer
3.2.4. Pattern Transfer into SiO2 Underlying Layer
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Barick, B.K.; Shomrat, N.; Green, U.; Katzman, Z.; Segal-Peretz, T. Fabrication of Nanoscale Oxide Textured Surfaces on Polymers. Polymers 2021, 13, 2209. https://doi.org/10.3390/polym13132209
Barick BK, Shomrat N, Green U, Katzman Z, Segal-Peretz T. Fabrication of Nanoscale Oxide Textured Surfaces on Polymers. Polymers. 2021; 13(13):2209. https://doi.org/10.3390/polym13132209
Chicago/Turabian StyleBarick, Barun K., Neta Shomrat, Uri Green, Zohar Katzman, and Tamar Segal-Peretz. 2021. "Fabrication of Nanoscale Oxide Textured Surfaces on Polymers" Polymers 13, no. 13: 2209. https://doi.org/10.3390/polym13132209