TiO2/CuO/Cu2O Photovoltaic Nanostructures Prepared by DC Reactive Magnetron Sputtering
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. XRD Study
3.2. Structural Characterization
3.3. I-V Characteristics
3.4. Active Layer Electrical Properties/Measurements
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Parameter | #12 | #14 | #15 | |||
---|---|---|---|---|---|---|
TiO2 | CuO/Cu2O | TiO2 | CuO/Cu2O | TiO2 | CuO/Cu2O | |
Interlayer Cu buffer | 5 s | |||||
Time [min] | 23 | 25 | 25 | 25 | 20 | 25 |
Power [W] | 120 | 70 | 120 | 70 | 120 | 70 |
Pressure process [Pa] | 1.1 | 1.1 | 1.2 | 1.2 | 1.1 | 1.1 |
Distance between the source and substrate [mm] | 58 | 58 | 58 | 58 | 58 | 58 |
Oxygen flow rates [cm3/s] | 4 | 4 | 4 | 4 | 4 | 4 |
Argon flow rates [cm3/s] | 0.5 | 1 | 0.5 | 1 | 0.5 | 1 |
Substrate temperature [°C] | 300 | 300 | 300 | 300 | 300 | 300 |
Cu top contact | 20 s | 60 s | 60 s |
#12 | #14 | #15 | ||||
---|---|---|---|---|---|---|
2 Theta (°) | 45.3 | 42.5 | 45.3 | 42.6 | 45.3 | 42.6 |
FWHM (rd) | 0.0084 | 0.0134 | 0.0098 | 0.0138 | 0.0119 | 0.0192 |
Composition | CuO | Cu2O | CuO | Cu2O | CuO | Cu2O |
Orientation | (200) | (002) | (200) | (111) | (200) | (111) |
Crystallite sizes [nm] | 12 | 11 | 9 | 10 | 12 | 8 |
Phases | Thickness of Layers (nm) | Lattice Parameters | δ | ||||
---|---|---|---|---|---|---|---|
a | b | c | β | ×1012 (m−2) | |||
(Å) | (°) | ||||||
#12 | CuO | 1223 ± 5 | 4.265(8) | 98.82(8) | 4.01 | ||
Cu2O | 4.660(5) | 3.41(1) | 5.13(2) | 8.12 | |||
#14 | CuO | 982 ± 5 | 4.66(1) | 3.44(1) | 5.11(2) | 98.93(2) | 12.77 |
Cu2O | 4.289(2) | 8.57 | |||||
#15 | CuO | 4.71(1) | 3.48(1) | 5.14(2) | 98.36(1) | 19.01 | |
Cu2O | 806 ± 5 | 4.289(2) | 16.67 |
Sample Number | Thickness of Layers: Copper Oxide: Titanium Dioxide [nm] | Mechanism of Growth | Composition of the Elements, At% |
---|---|---|---|
#12 | 1223 ± 5:47 ± 2 | Frank van der Merwe | CuK: 67 ± 1 OK: 33 ± 1 |
#14 | 996 ± 5:55 ± 2 | Volmer-Weber | CuK: 69 ± 1 OK: 31 ± 1 |
#15 | 812 ± 5:43 ± 2 | Volmer-Weber | CuK: 68 ± 1 OK: 31 ± 1 |
No. | Isc [µA] | Jsc [µA/cm2] | Voc [mV] | Pmax [µW] | F [%] | Rsh [Ώ] |
---|---|---|---|---|---|---|
#12 | 4.0 ± 0.2 | 4.2 ± 0.8 | 16.1 ± 4.8 | 0.017 ± 0.01 | 30 ± 1 | 4250 ± 8 |
#14 | 4.3 ± 0.2 | 4.3 ± 0.8 | 0.54 ± 0.31 | 0.0006 ± 0.0003 | 31 ± 1 | 1269 ± 3 |
Sample # | Thickness [nm] | Resistivity [Ω·cm] | Mobility [cm2/(Vs)] | Carrier Concentration [1/cm3] |
---|---|---|---|---|
#12 CuO | 1223 | 1.57 | 4.34 | 5.8 × 1017 |
#14 CuO | 996 | 0.28 | ||
#15 CuO | 812 | 0.0023 | 40.3 | 6.77 × 1019 |
#12 TiO2 | 47 | n.a. (bad contact quality) | ||
#14 TiO2 | 56 | n.a. (bad contact quality) | ||
#15 TiO2 | 44 | 0.013 | 5.04 | 9.62 × 1019 |
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Wisz, G.; Sawicka-Chudy, P.; Sibiński, M.; Płoch, D.; Bester, M.; Cholewa, M.; Woźny, J.; Yavorskyi, R.; Nykyruy, L.; Ruszała, M. TiO2/CuO/Cu2O Photovoltaic Nanostructures Prepared by DC Reactive Magnetron Sputtering. Nanomaterials 2022, 12, 1328. https://doi.org/10.3390/nano12081328
Wisz G, Sawicka-Chudy P, Sibiński M, Płoch D, Bester M, Cholewa M, Woźny J, Yavorskyi R, Nykyruy L, Ruszała M. TiO2/CuO/Cu2O Photovoltaic Nanostructures Prepared by DC Reactive Magnetron Sputtering. Nanomaterials. 2022; 12(8):1328. https://doi.org/10.3390/nano12081328
Chicago/Turabian StyleWisz, Grzegorz, Paulina Sawicka-Chudy, Maciej Sibiński, Dariusz Płoch, Mariusz Bester, Marian Cholewa, Janusz Woźny, Rostyslav Yavorskyi, Lyubomyr Nykyruy, and Marta Ruszała. 2022. "TiO2/CuO/Cu2O Photovoltaic Nanostructures Prepared by DC Reactive Magnetron Sputtering" Nanomaterials 12, no. 8: 1328. https://doi.org/10.3390/nano12081328