Oxidation Behavior of Ta–Al Multilayer Coatings
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. As-Deposited Ta–Al Coatings
3.2. Oxidation of Ta–Al Coatings in 1% O2–99% Ar
3.3. Oxidation of Ta–Al Coatings in Air
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Sample | Power | Chemical Composition (at.%) | Thickness (nm) | |||
---|---|---|---|---|---|---|
PTa (W) | PAl (W) | Ta | Al | O | ||
Ta0.33Al0.67 | 100 | 200 | 31.7 ± 0.4 | 64.5 ± 0.2 | 3.8 ± 0.2 | 1110 |
Ta0.61Al0.39 | 150 | 150 | 58.3 ± 0.4 | 37.3 ± 0.2 | 4.4 ± 0.4 | 884 |
Ta0.81Al0.19 | 200 | 100 | 76.8 ± 0.3 | 18.2 ± 0.1 | 5.0 ± 0.2 | 820 |
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Chen, Y.-I.; Lin, N.-Y.; Ke, Y.-E. Oxidation Behavior of Ta–Al Multilayer Coatings. Coatings 2019, 9, 810. https://doi.org/10.3390/coatings9120810
Chen Y-I, Lin N-Y, Ke Y-E. Oxidation Behavior of Ta–Al Multilayer Coatings. Coatings. 2019; 9(12):810. https://doi.org/10.3390/coatings9120810
Chicago/Turabian StyleChen, Yung-I, Nai-Yuan Lin, and Yi-En Ke. 2019. "Oxidation Behavior of Ta–Al Multilayer Coatings" Coatings 9, no. 12: 810. https://doi.org/10.3390/coatings9120810