Micro/Nano Manufacturing Processes: Theories and Optimization Techniques

© 2024 by the authors; CC BY-NC-ND license

laser induced thermal-crack propagation; high speed scanning; glass-silicon double-layer wafer; nanoscale surface roughness; micro-structures; ultra-precision machining; FTS/STS; fly cutting; raster milling; low-temperature gas cooling technology; laser-induced thermal crack propagation (LITP); soda-lime glass; track correction; femtosecond laser; metallic glass; ablation; two-temperature model; molecular dynamics; injection mold; helical cylindrical pinion; plastic torsion forming; LS-WEDM; remaining useful life; similarity principle; degradation rate; offset coefficient; micro-drilling; packaging substrate; hot filament chemical vapor deposition; diamond-coated tools; micro-milling; zirconia; surface integrity; compliant mechanism; topology optimization; fatigue failure; static strength; manufacturability; micro-hole drilling; production line; complex event; emergency insertion; tool failure; tantalum metal; lubrication media; DLC; limit drawing ratio; surface topography quality; parallel grinding; surface generation; surface roughness; speed ratio; optimization; ultrasonic vibration; surface microstructures; aspect ratio; hierarchical micropillar array; superhydrophobic; optimization; productivity; mechanical dry transfer; substrate geometry; suspended carbon nanotube; additive manufacturing; stereolithography (SLA); microchannels; capillary-driven; n/a