*3.2. Circle Trajectory*

#### 3.2.1. Objective of Four-Time Magnification

As illustrated in Figure 9, the desired circular trajectories have diameters of 200 μm, 500 μm, and 800 μm. Figure 9a,b shows the closeness values of one pixel (i.e., 1 μm) and five pixels (i.e., 5 μm), respectively. The roundness varies from 7 μm to 27 μm. The time consumption varies from 174 s to 856 s. The detailed results are listed in Table 2. Obviously, lower closeness values lead to higher accuracy but more time is needed to complete the tasks.

**Figure 9.** The experiment results of circles of different diameters under the FOV of four-time objective. The closeness values are 1 μm and 5 μm in (**a**) and (**b**), respectively.

#### 3.2.2. Objective of 10-Time Magnification

As described in Section 3.1.2, we now change to a higher magnification objective to achieve an improved image resolution. Theoretically, using higher magnification achieves better resolution but smaller FOV, which limits the full working range. Referring to Figure 10, the desired trajectories are circles of diameters at 100 μm, 200 μm, and 240 μm. Figure 10a,b shows the closeness values of one pixel (i.e., 0.38 μm) and five pixels (i.e., 1.9 μm), respectively. Table 2 indicates the detailed results.

**Figure 10.** The experiment results of circles of different diameters under the FOV of 10-time objective. The closeness values are 0.38 μm and 1.9 μm in (**a**) and (**b**), respectively.
