**Kyungjin Park 1, Kanghyun Kim 2, Seung Chul Lee 3, Geunbae Lim 1,2,\* and Jong Hyun Kim 2,3,\***


Received: 7 July 2018; Accepted: 15 August 2018; Published: 17 August 2018

**Abstract:** In this paper, we developed a method of fabricating polymer microstructures at various angles on a single substrate via synchrotron X-ray lithography coupled with simple dimensional transformations. Earlier efforts to create various three-dimensional (3D) features on flat substrates focused on the exposure technology, material properties, and light sources. A few research groups have sought to create microstructures on curved substrates. We created tilted microstructures of various angles by simply deforming the substrate from 3D to two-dimensional (2D). The microstructural inclination angles changed depending on the angles of the support at particular positions. We used convex, concave, and S-shaped supports to fabricate microstructures with high aspect ratios (1:11) and high inclination angles (to 79◦). The method is simple and can be extended to various 3D microstructural applications; for example, the fabrication of microarrays for optical components, and tilted micro/nanochannels for biological applications.

**Keywords:** Synchrotron X-rays; lithography; curved substrate; microstructures
