*3.1. Pre-Simulation Assumptions*

Thermal simulation of the investigated MEMS structure was carried out using Matlab environment and proposed approximation scheme for the DPL model. The simulation results were calculated using the following material thermal parameters [23,44] included in Table 1:


**Table 1.** Considered material parameters' values [23,44].

Moreover, based on [23,45], the DPL model parameters were estimated. The platinum resistors are characterized by the heat flux time lag approximately equal to 550 ps and the temperature time lag established at 15.6 ns. For other materials, these values are set to 18 ns and 480 ns, respectively. In order to make an analysis easier, all results were normalized according to the following Equation:

$$T\_k^{norm}(t) = \frac{T\_k(t)}{\max\_{t,k} \{ T\_k(t) \}} k \in \{ 1, 2, \dots, n\_x \cdot n\_{\mathcal{Y}} \}, t \in \mathbb{R}\_+ \cup \{ 0 \} \tag{22}$$
