**Alexander Tikhonravov 1,\*, Igor Kochikov 1, Ivan Matvienko 1, Temur Isaev <sup>2</sup> and Anatoly Yagola <sup>2</sup>**


Received: 7 November 2019; Accepted: 27 November 2019; Published: 1 December 2019

**Abstract:** This article presents a computational approach for comparing various broadband monitoring strategies, taking into account the positive and negative effects associated with the correlation of thickness errors caused by the monitoring procedure. The approach is based on statistical estimates of the strength of the error self-compensation effect and the expected level of thickness errors. Its application is demonstrated by using a 50-layer, nonpolarizing edge filter. The presented approach is general and can be applied to verify the prospects of broadband monitoring for the production of various types of optical coatings.

**Keywords:** thin films; optical coatings; monitoring; deposition
