*4.1. Comparison of Lattice Disordering with Sputtering*

The electronic stopping power (Se) dependence of lattice disordering YXD, together with electronic sputtering, is summarized in Table 6, recognizing that most of the data have used TRIM1997. Results using SRIM2013 and TRIM1997 are compared in Section 3. Both exponents of the power-law fits are similar for SiO2, ZnO, Fe2O3, TiN and WO<sup>3</sup> films, as well as for KBr and SiC. As mentioned in Section 3, it can be seen that the exponent of the lattice disordering NXD is comparable with that of sputtering Nsp, except for Fe2O3, in which Nsp is exceptionally close to unity, as in the case of Cu2O (Nsp = 1.0) [56] and CuO (Nsp = 1.08) [59]. The similarity of the exponent of lattice disordering and sputtering for SiO2, ZnO, Fe2O3, TiN, WO3, KBr and SiC imply that both phenomena originate from similar mechanisms, despite the fact that small displacements and annealing and/or the reduction in disordering via ion-induced defects are involved in the lattice disordering, whereas large displacements are involved in sputtering. The result of Fe2O<sup>3</sup> indicates that the electronic excitation is more effective for lattice disordering. In

the case of CuO, NXD is nearly zero [59]. In Table 6, YXD (10−<sup>12</sup> cm<sup>2</sup> ) at S<sup>e</sup> = 10 keV/nm and <sup>Y</sup>XD/Ysp (×10−<sup>15</sup> cm<sup>2</sup> ) are listed. It is found that the ratio YXD/Ysp is an order of 10−<sup>15</sup> cm<sup>2</sup> , except for ZnO, where the sputtering yields are exceptionally small. More data of lattice disordering would be desired for further discussion.

**Table 6.** Summary of electronic stopping power (Se in keV/nm) dependence of lattice disordering YXD = (BXDSe) NXD for the present results of SiO<sup>2</sup> , ZnO, Fe2O<sup>3</sup> and TiN films, and sputtering yields Ysp = (BspSe) Nsp of the present result for TiN. Lattice disordering and sputtering yields of WO<sup>3</sup> film from [58,72], those of KBr and SiC from [56] and sputtering yields of SiO<sup>2</sup> , ZnO and Fe2O<sup>3</sup> (see Section 3). Constant BXD and Bsp and the exponent NXD and Nsp are obtained using TRIM1997 and those using SRIM2013 are in parentheses. YXD at S<sup>e</sup> = 10 keV and YXD/Ysp (10−<sup>15</sup> cm<sup>2</sup> ) are given.

