*2.3. Ion-Implanter*

A high current ion beam irradiation equipment named the 200 kV ion-implanter has been installed at WERC for research on the radiation effects of materials related to atomic power plants and of space electronics. This accelerator has also been utilized for the modification of semiconductors and metallic alloys. The schematic diagram of the 200 kV ion-implanter are shown in Figure 4. *Quantum Beam Sci.* **2021**, *5*, x FOR PEER REVIEW 6 of 18

**Figure 4.** The schematic diagram of 200 kV ion-implanter at WERC. **Figure 4.** The schematic diagram of 200 kV ion-implanter at WERC.

In irradiation room 4, we can perform irradiation experiments with ion beams extracted from the synchrotron. Figure 5 shows the layout of the beam line in irradiation room 4. After an ion beam is accelerated by the synchrotron and transported to irradiation room 4, the beam is deflected to the direction of the target samples by a bending magnet and is shaped by two sets of quadrupole magnet doublets. Then, the ion beam is emitted into the atmosphere through a copperized polyimide thin film window. In order to form the appropriate irradiation field on the target surface, the ion beam is wobbled by a set of wobbling magnets and/or scattered by a tungsten scatterer and collimated by a brass block

**3. Beamlines and Irradiation Apparatuses for the Research on Irradiation Effects on** 

**Space Electronics** 

collimator.

The 200 kV ion-implanter consists of a microwave ion source, a 50 kV first acceleration tube, a mass separation magnet, and a 150 kV second acceleration tube. The microwave ion source supplies positive ions from gas targets, such as H2, He, N2, Ne, Ar, etc. Positive ions generated in the ion source are accelerated up to 50 keV by the first acceleration tube. Then, they are sorted by mass with the mass separation magnet. In the case of the H<sup>2</sup> gas target, we can select H<sup>+</sup> or H<sup>2</sup> <sup>+</sup> by changing the magnet field of the mass separator. After the mass separation, the ions are accelerated again up to 200 keV by the second acceleration tube. The ion energy can be changed from 10 to 200 keV. The maximum beam currents available from the first and the second acceleration tubes are 50 and 30 mA, respectively. In the actual irradiation experiments, however, the beam current is reduced to less than several tens of micro A/cm<sup>2</sup> to avoid beam heating of the target materials during the irradiation.
