*3.2. Beamline of the Tandem Accelerator in Irradiation Room 2*

The ion beam extracted from the tandem accelerator is not only injected into the synchrotron system but is also directly transported to irradiation room 1 and 2. Three beam lines are installed in irradiation room 2. One of the beam lines is used for the research on irradiation effects on space electronics. Hydrogen (H), helium (He), carbon (C), nickel (Ni), and copper (Cu) ions are available for the irradiation experiments. The beam line consists of two scanning magnets and two apertures; it ends with an irradiation chamber with high and cold temperature sample stages with three-axis goniometers. Figure 6 shows the beam line and the irradiation chamber. Ion beams are injected into the irradiation chamber from the back to the front in the figure. A sample stage on the goniometer can be moved about 60 mm horizontally and about 45 mm vertically with a precision of less than 0.05 mm and rotated 180◦ about the horizontal axis with a precision of less than 0.05◦ . The shape of the beam is checked using a fluorescent plate which is placed on the sample stage. The beam diameter on the sample stage can be reduced to less than 10 mm. To ensure a homogeneous

irradiation for large area targets, ion beams are scanned horizontally with a frequency of 50 Hz and vertically with a frequency of 0.1–5.0 Hz by the scanning magnets with the continuous triangle waveform current. The irradiation can be performed at high (20 to 700 ◦C) or cold (−173 to 20 ◦C) temperatures. The temperature on the sample stages is measured by a thermocouple. The maximum setting area of samples is 60 <sup>×</sup> 60 mm<sup>2</sup> on the sample stage. H and He beams can be scanned over the above area. The scan area for Ni beams is narrower than the light ion cases because Ni is much heavier than H or He. The horizontal and vertical scan widths for a 10 MeV Ni3+ beam are 24 and 20 mm at maximum, respectively. The degree of vacuum in the irradiation chamber is less than <sup>9</sup> <sup>×</sup> <sup>10</sup>−<sup>4</sup> Pa, even during the irradiation. Electronic device samples can be wired in the chamber via electrical feedthroughs to measure the electronic characteristics of the devices during the irradiation. *Quantum Beam Sci.* **2021**, *5*, x FOR PEER REVIEW 9 of 18

**Figure 6.** Beamline and irradiation chamber for the irradiation of space electronics in irradiation room 2. **Figure 6.** Beamline and irradiation chamber for the irradiation of space electronics in irradiation room 2.

### *3.3. Beamline of the 200 kV Ion-Implanter in Irradiation Room 1 3.3. Beamline of the 200 kV Ion-Implanter in Irradiation Room 1*

The ion beam accelerated by the ion-implanter in irradiation room 1 is manipulated using a bending magnet and three quadrupole magnets. The beam size is defined by X-Y slits (shown in Figure 7). The beam can be uniformly spread up to 10 cm squares. The performances of the 200 kV ion-implanter are summarized in Table 3. An irradiation chamber has five sample stages (Figure 8, left). Three of them have a heating system, and the sample temperature can be controlled from room temperature to 1000 °C during the irradiation. The other two sample stages have a water cooling system, which can keep samples around room temperature even during the irradiation. To check the beam uniformly, a fluorescence plate is set at the bottom of the target stages (Figure 8, right). An aperture for defining the beam shape and a –500 V secondary electron suppresser are The ion beam accelerated by the ion-implanter in irradiation room 1 is manipulated using a bending magnet and three quadrupole magnets. The beam size is defined by X-Y slits (shown in Figure 7). The beam can be uniformly spread up to 10 cm squares. The performances of the 200 kV ion-implanter are summarized in Table 3. An irradiation chamber has five sample stages (Figure 8, left). Three of them have a heating system, and the sample temperature can be controlled from room temperature to 1000 ◦C during the irradiation. The other two sample stages have a water cooling system, which can keep samples around room temperature even during the irradiation. To check the beam uniformly, a fluorescence plate is set at the bottom of the target stages (Figure 8, right). An aperture for defining the beam shape and a –500 V secondary electron suppresser are placed in front of each sample stage. The beam current on the sample stage is measured by a pico-ammeter.

**Categories Specifications** 

Beam energy 10 to 200 keV

Irradiation area Maximum 100 × 100 mm2

Heating stage control Room temperature to 1000 °C

Target stage Heating stage 3, Cooling stage 2

Typical beam current <1 mA Beam current density ~20 μA/cm2

placed in front of each sample stage. The beam current on the sample stage is measured

Beam elements H, H2, He, Ne, N, N2, O, O2, Ar, CO, etc.

by a pico-ammeter.


**Table 3.** Performance of the 200 kV ion-implanter.

*Quantum Beam Sci.* **2021**, *5*, x FOR PEER REVIEW 10 of 18

**Figure 7.** Beamline and irradiation chamber of the ion-implanter. **Figure 7.** Beamline and irradiation chamber of the ion-implanter. **Figure 7.** Beamline and irradiation chamber of the ion-implanter.

**Figure 8.** Sample stages (**left**), and captured image of the fluorescence plate for beam irradiation (**right**). **Figure 8.** Sample stages (**left**), and captured image of the fluorescence plate for beam irradiation (**right**). **Figure 8.** Sample stages (**left**), and captured image of the fluorescence plate for beam irradiation (**right**).

Many radioactive sources exist in space such as electrons, X/γ-ray, and ions. Protons are the main ion component in space; thus, ion irradiation effects are investigated mainly using proton beam. Typical beam currents for irradiation experiments are ~1 nA, ~100 nA, and 1–10 μA, for the synchrotron, the tandem, and the ion-implanter, respectively. The synchrotron is used usually for research on SEE because high energy proton beam can simulate the high-density electronic excitation by the space radiation. On the other hand, the medium energy proton beam from the tandem accelerator is used for research on TID/DDD. The low energy ion beam with a high intensity from the ion-implanter is used

Many radioactive sources exist in space such as electrons, X/γ-ray, and ions. Protons are the main ion component in space; thus, ion irradiation effects are investigated mainly using proton beam. Typical beam currents for irradiation experiments are ~1 nA, ~100 nA, and 1–10 μA, for the synchrotron, the tandem, and the ion-implanter, respectively. The synchrotron is used usually for research on SEE because high energy proton beam can simulate the high-density electronic excitation by the space radiation. On the other hand, the medium energy proton beam from the tandem accelerator is used for research on TID/DDD. The low energy ion beam with a high intensity from the ion-implanter is used

*4.1. Recent Experiments Using Accelerators at WERC* 

*4.1. Recent Experiments Using Accelerators at WERC* 
