**6. Patents**

Grigoriev Sergey Nikolaevich; Metel Alexander Sergeevich; Volosova Marina Alexandrovna; Melnik Yury Andreevich; Mustafaev Enver Serverovich. Device for processing dielectric products with fast atoms; #RU2752877C1, 2020-12-11.

**Author Contributions:** Conceptualization, S.N.G. and M.A.V.; methodology, S.V.F. and A.S.M.; software, S.V.F. and N.A.S.; validation, A.S.M. and S.R.S.; formal analysis, A.S.M. and A.A.O.; investigation, S.V.F.; resources, N.A.S.; data curation, S.R.S.; writing—original draft preparation, S.R.S. and N.A.S.; writing—review and editing, A.A.O. and M.A.V.; visualization, S.R.S. and N.A.S.; supervision, S.N.G.; project administration, S.N.G. and M.A.V.; funding acquisition, A.S.M. All authors have read and agreed to the published version of the manuscript.

**Funding:** This research was funded by the Russian Science Foundation, gran<sup>t</sup> number No. 20-19-00620.

**Institutional Review Board Statement:** Not applicable.

**Informed Consent Statement:** Not applicable.

**Data Availability Statement:** Data are available in a publicly accessible repository.

**Acknowledgments:** The research was conducted at the Department of High-Efficiency Processing Technologies of MSTU Stankin.

**Conflicts of Interest:** The authors declare no conflict of interest.
