**Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices**

Editor

**Agn ˙e Zukauskait˙e ˇ**

MDPI • Basel • Beijing • Wuhan • Barcelona • Belgrade • Manchester • Tokyo • Cluj • Tianjin

*Editor* Agne˙ Zukauskait ˇ e˙ S2S-Technologies and Precision Coating Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP Dresden Germany

*Editorial Office* MDPI St. Alban-Anlage 66 4052 Basel, Switzerland

This is a reprint of articles from the Special Issue published online in the open access journal *Micromachines* (ISSN 2072-666X) (available at: www.mdpi.com/journal/micromachines/special issues/Piezoelectric AlScN Thin Films).

For citation purposes, cite each article independently as indicated on the article page online and as indicated below:

LastName, A.A.; LastName, B.B.; LastName, C.C. Article Title. *Journal Name* **Year**, *Volume Number*, Page Range.

**ISBN 978-3-0365-6367-1 (Hbk) ISBN 978-3-0365-6366-4 (PDF)**

© 2023 by the authors. Articles in this book are Open Access and distributed under the Creative Commons Attribution (CC BY) license, which allows users to download, copy and build upon published articles, as long as the author and publisher are properly credited, which ensures maximum dissemination and a wider impact of our publications.

The book as a whole is distributed by MDPI under the terms and conditions of the Creative Commons license CC BY-NC-ND.
