Reprint
SiC Based Miniaturized Devices, 3rd Edition
Edited by
July 2026
120 pages
- ISBN 978-3-7258-8283-0 (Hardback)
- ISBN 978-3-7258-8284-7 (PDF)
Print copies available soon
This is a Reprint of the Special Issue SiC Based Miniaturized Devices, 3rd Edition that was published in
Engineering
Summary
This Reprint includes some of the latest developments in SiC microsystems such as power electronics, micromachines and microsensors. Silicon carbide continues to grow in areas of extreme temperature and mechanical fatigue where silicon is prone to reliability and performance issues. The compilation of papers in this Special Issue mainly investigates state-of-the-art power electronics, used in all of these applications; additionally, two papers address the latest developments in MEMS and sensors.