- Article
Study on the Influence of KOH Wet Treatment on Red μLEDs
- Shuhan Zhang,
- Qian Fan,
- Xianfeng Ni,
- Li Tao and
- Xing Gu
InGaN-based red micro-light-emitting diodes (µLEDs) of different sizes were prepared in this work. The red GaN epilayers were grown on 4-inch sapphire substrates through metal-organic chemical vapor deposition (MOCVD). Etching, sidewall treatment, an...