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Journal: Sensors, 2014
Volume: 14
Number: 22099

Article: Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range
Authors: by Bing-Yu Wang, Fan-Chun Hsieh, Che-Yu Lin, Shao-En Chen, Fong-Zhi Chen and Chia-Che Wu
Link: https://www.mdpi.com/1424-8220/14/11/22099

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