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Journal: Sensors, 2019
Volume: 19
Number: 5405
Article:
Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations
Authors:
by
He Ren and Wei-Feng Sun
Link:
https://www.mdpi.com/1424-8220/19/24/5405
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