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Journal: Sensors, 2019
Volume: 19
Number: 5405

Article: Characterizing Dielectric Permittivity of Nanoscale Dielectric Films by Electrostatic Micro-Probe Technology: Finite Element Simulations
Authors: by He Ren and Wei-Feng Sun
Link: https://www.mdpi.com/1424-8220/19/24/5405

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