Motion Detection Using Tactile Sensors Based on Pressure-Sensitive Transistor Arrays
Abstract
:1. Introduction
2. Tactile Sensor Arrays
2.1. Parameters of Tactile Sensors and Their Arrays
2.2. Various Types of Tactile Sensors
2.3. Field Effect Transistor (FET)-Based Tactile Sensor Arrays
3. Pressure-Sensitive Transistor Arrays
3.1. FET-Based Tactile Sensor Arrays with Pressure-Sensing Components
3.1.1. Transistor with Structure-Modified, Pressure-Resistive Component
3.1.2. Transistor Arrays with a Material-Modified, Pressure-Sensitive Component
3.2. Pressure-Sensitive Transistor Arrays
3.2.1. Options for Transistor Channel Materials
3.2.2. Options for the Dielectric Materials of the Transistor Gate
3.3. Multimodal, Multifunctional Tactile Sensor Arrays
4. Future Applications for the Tactile Sensor Arrays Based on FETs
4.1. Robotics
4.2. Artificial Intelligence (AI)
4.3. Human-Machine Interface (HMI)
4.4. Healthcare Biosystems
5. Prospects
6. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Device Composition | Pressure-Sensing Range | Response Time | Spatial Resolution | Sensitivity | Reference | |
---|---|---|---|---|---|---|
Structure-Modified | PSR | Minimal pressure down to 1 kPa | 12 × 12 | [63] | ||
Structure-Modified | 2D graphene sheet | 5 kPa~40 kPa | 4 × 4 | 0.12 kPa−1 | [59] | |
Structure-Modified | PZT | 0.1 ms | 8 × 8 | 0.005 Pa−1 | [79] | |
Structure-Modified | AgNWs | 0–10 kPa | 10 ms | 1090 kPa−1 | [80] | |
Material-Modified | PSR | 2–15 kPa | 32 × 32 | [62] | ||
Material-Modified | PSR | 0.1 s | 19 × 18 | ∼11.5 μS kPa−1 | [81] | |
Material-Modified | Carbon-nanotube, PSR | 1–7.2 kPa | <30 ms | 20 × 20 | ~800% kPa−1 | [82] |
Material-Modified | OLED, PSR | 5–98 kPa | 1 ms | 16 × 16 | ~42.7 Cd m−2 kPa−1 | [64] |
Material-Modified | Ferroelectric nanoparticle | 2–22 MPa | [83] |
Dielectric Materials | Channel Materials | Pressure-Sensing Range | Response Time | Spatial Resolution | Sensitivity | Reference |
---|---|---|---|---|---|---|
Pressure-sensitive rubber (PSR) | 50 nm-thick pentacene layer | 0 to 30 kPa | ~30 ms of cycle time | 16 × 16 arrays 10 dpi (254 mm) | [62] | |
Ecoflex-porous elastomeric | 0.1 Pa to ~130 kPa | Fast response time | 0.17 μm Position resolution | 0.601 at 5 kPa | [95] | |
Microstructured V-shape-groove PDMS (pyramid molding PDMS) | Rubrene single crystal | 0 to ~7 kPa | ~ 1 mm | (<2 kPa) 0.55 (>2 kPa) to 0.15 kPa−1 | [55] | |
Microstructural PDMS | PiI2T-Si | 0 to 60 kPa | < 10 ms | ~ 1.7 mm | (<8 kPa) 8.2 (>30 kPa) 0.38 | [93] |
PDMS with air-gap | Graphene | 250 Pa to ~3 MPa | 30 ms | 1 mm | (<500 kPa) to 2.05 × 10−4 and (>500 kPa) to 9.43 × 10−6 | [67] |
PDMS + G-PDMS (G-PDMS; synthesis of glycerol and PDMS at 1:10) | 200 Pa to 5 MPa | 25 ms | 500 μm | (<500 kPa) 1.8 (>500 kPa) 0.018 | [15] |
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Jang, J.; Jun, Y.S.; Seo, H.; Kim, M.; Park, J.-U. Motion Detection Using Tactile Sensors Based on Pressure-Sensitive Transistor Arrays. Sensors 2020, 20, 3624. https://doi.org/10.3390/s20133624
Jang J, Jun YS, Seo H, Kim M, Park J-U. Motion Detection Using Tactile Sensors Based on Pressure-Sensitive Transistor Arrays. Sensors. 2020; 20(13):3624. https://doi.org/10.3390/s20133624
Chicago/Turabian StyleJang, Jiuk, Yoon Sun Jun, Hunkyu Seo, Moohyun Kim, and Jang-Ung Park. 2020. "Motion Detection Using Tactile Sensors Based on Pressure-Sensitive Transistor Arrays" Sensors 20, no. 13: 3624. https://doi.org/10.3390/s20133624