Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device †
Abstract
:1. Introduction
2. Methods
2.1. Simulation—Analysis and Design Methodology
2.2. Experimental—Fabrication and Characterization
3. Results
3.1. Experimental Results of the MMI Devices Based on the 220 nm Device Layer Platform
3.2. Simulation Results of Ultrathin MMI Sensors
3.3. Applications of Ultrathin MMI Sensors
4. Discussion
5. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Work | Sensitivity | Footprint | Study |
---|---|---|---|
This work—50 nm | 420 nm/RIU | 4.5 μm × 4 mm | Sim |
This work—70 nm | 350 nm/RIU | 3 μm × 2.4 mm | Sim |
Si-on-Si [27] | 0.8/°C | 32 μm × 5 mm | Sim |
Doped silica [25] | 1900 nm/RIU | 7 μm × 30 mm | Sim |
Multimode fiber [26] | 297 nm/RIU | 125 μm × 58.6 mm | Exp |
SOI [42] | 0.0364 THz/°C | 27 μm × 1.144 mm | Sim |
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Y. Elsayed, M.; M. Sherif, S.; S. Aljaber, A.; A. Swillam, M. Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device. Sensors 2020, 20, 4955. https://doi.org/10.3390/s20174955
Y. Elsayed M, M. Sherif S, S. Aljaber A, A. Swillam M. Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device. Sensors. 2020; 20(17):4955. https://doi.org/10.3390/s20174955
Chicago/Turabian StyleY. Elsayed, Mohamed, Sherif M. Sherif, Amina S. Aljaber, and Mohamed A. Swillam. 2020. "Integrated Lab-on-a-Chip Optical Biosensor Using Ultrathin Silicon Waveguide SOI MMI Device" Sensors 20, no. 17: 4955. https://doi.org/10.3390/s20174955