Angle-Sensitive Detector Based on Silicon-On-Insulator Photodiode Stacked with Surface Plasmon Antenna
Abstract
:1. Introduction
2. Device Structure and Fabrication Process
3. Principle of Angle Detection
4. Results and Discussions
4.1. 1D L/S SP Antenna
4.2. 2D Hole Array SP Antenna
5. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Nagarajan, A.; Hara, S.; Satoh, H.; Panchanathan, A.P.; Inokawa, H. Angle-Sensitive Detector Based on Silicon-On-Insulator Photodiode Stacked with Surface Plasmon Antenna. Sensors 2020, 20, 5543. https://doi.org/10.3390/s20195543
Nagarajan A, Hara S, Satoh H, Panchanathan AP, Inokawa H. Angle-Sensitive Detector Based on Silicon-On-Insulator Photodiode Stacked with Surface Plasmon Antenna. Sensors. 2020; 20(19):5543. https://doi.org/10.3390/s20195543
Chicago/Turabian StyleNagarajan, Anitharaj, Shusuke Hara, Hiroaki Satoh, Aruna Priya Panchanathan, and Hiroshi Inokawa. 2020. "Angle-Sensitive Detector Based on Silicon-On-Insulator Photodiode Stacked with Surface Plasmon Antenna" Sensors 20, no. 19: 5543. https://doi.org/10.3390/s20195543
APA StyleNagarajan, A., Hara, S., Satoh, H., Panchanathan, A. P., & Inokawa, H. (2020). Angle-Sensitive Detector Based on Silicon-On-Insulator Photodiode Stacked with Surface Plasmon Antenna. Sensors, 20(19), 5543. https://doi.org/10.3390/s20195543