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Journal: Sensors, 2021
Volume: 21
Number: 4073

Article: Capacitive Measurements of SiO2 Films of Different Thicknesses Using a MOSFET-Based SPM Probe
Authors: by Hoontaek Lee, Kumjae Shin and Wonkyu Moon
Link: https://www.mdpi.com/1424-8220/21/12/4073

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