Nonlinear and Dotted Defect Detection with CNN for Multi-Vision-Based Mask Inspection
Abstract
:1. Introduction
- The data for training and verification were produced in the real mask production lines.
- An efficient pre-processing process was developed to apply highly small dotted defects, which were difficult to be trained and inferred to the CNN.
- Various types of nonlinear and dotted defects were successfully detected by the proposed method based on the CNN.
2. Problem Description
2.1. Multi-Vision-Based Mask Inspection
2.2. Mask Defect Detection
3. Methods
3.1. Data Acquisition
3.2. Nonlinear Defect Detection
3.3. Dotted Defect Detection
4. Experiments and Results
4.1. Mask Defect Detection
4.2. Quantitative Comparison Results
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Conflicts of Interest
References
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Related Works | Real Data | Inspection Method | Mask Application |
---|---|---|---|
[23,24] | O X | Eddy current | X X |
[26,27] | O O | Thermography | X X |
[29,30] | O X | Dye penetrant testing | X X |
Proposed | O | Multi-vision system | O |
TP | FN | FP | TN | Recall | Precision | Accuracy | |
---|---|---|---|---|---|---|---|
Proposed method | 300 | 0 | 1 | 299 | 1 | 0.99 | 99.8% |
Previous work [32] | 256 | 44 | 63 | 237 | 0.85 | 0.8 | 82.1% |
YOLO v5 | 198 | 102 | 88 | 212 | 0.66 | 0.69 | 68.3% |
SSD | 223 | 73 | 70 | 230 | 0.75 | 0.76 | 75.5% |
RetinaNet | 182 | 118 | 86 | 214 | 0.6 | 0.67 | 66% |
TP | FN | FP | TN | Recall | Precision | Accuracy | |
---|---|---|---|---|---|---|---|
Proposed method | 299 | 1 | 0 | 300 | 0.99 | 1 | 99.8% |
Previous work [32] | 244 | 56 | 89 | 211 | 0.81 | 0.73 | 75.8% |
YOLO v5 | 206 | 94 | 119 | 181 | 0.68 | 0.63 | 64.5% |
SSD | 229 | 71 | 97 | 203 | 0.76 | 0.7 | 72% |
RetinaNet | 185 | 115 | 141 | 159 | 0.61 | 0.56 | 57.3% |
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Woo, J.; Lee, H. Nonlinear and Dotted Defect Detection with CNN for Multi-Vision-Based Mask Inspection. Sensors 2022, 22, 8945. https://doi.org/10.3390/s22228945
Woo J, Lee H. Nonlinear and Dotted Defect Detection with CNN for Multi-Vision-Based Mask Inspection. Sensors. 2022; 22(22):8945. https://doi.org/10.3390/s22228945
Chicago/Turabian StyleWoo, Jimyeong, and Heoncheol Lee. 2022. "Nonlinear and Dotted Defect Detection with CNN for Multi-Vision-Based Mask Inspection" Sensors 22, no. 22: 8945. https://doi.org/10.3390/s22228945
APA StyleWoo, J., & Lee, H. (2022). Nonlinear and Dotted Defect Detection with CNN for Multi-Vision-Based Mask Inspection. Sensors, 22(22), 8945. https://doi.org/10.3390/s22228945