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Journal: Sensors, 2024
Volume: 24
Number: 4499
Article:
Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams
Authors:
by
Ahmad Rahbar Ranji, Gnanesh Nagesh, Fangyan Sun and Mohammed Jalal Ahamed
Link:
https://www.mdpi.com/1424-8220/24/14/4499
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