Surface Acoustic Wave Sensors for Wireless Temperature Measurements above 1200 Degree Celsius
Abstract
:1. Introduction
2. Design and Tests of High-Temperature Sensors
2.1. Modelling and Simulations
2.2. Sensor Fabrication
2.3. Test System
3. Results and Discussion
3.1. Electrical Characteristics
3.2. Wireless Temperature Measurement Range and Accuracy
3.3. Lifespan and Failure Analysis
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Electrode and Substrate Materials | Wireless Temperature Measurement Range | Refs. |
---|---|---|
Al/LiNbO3 | [35] | |
Pt/Ti/LGS | [13] | |
Pt/Ti/LGS | [14] | |
Al/Ti/Al/Ti/LiNbO3 | [36] | |
Au/LiNbO3 | [37] | |
Copper-doped Al/Quartz | [16] | |
Al/LiNbO3 | [15] | |
Al/Quartz | 0 | [17] |
Pt-10%Rh/Zr/Pt-10%Rh/Zr/Pt-10%Rh/Zr/LGS | This work |
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Zhang, H.; Mu, D.; Zhang, Z.; Zhang, J.; Sun, J.; Jin, H. Surface Acoustic Wave Sensors for Wireless Temperature Measurements above 1200 Degree Celsius. Sensors 2024, 24, 4945. https://doi.org/10.3390/s24154945
Zhang H, Mu D, Zhang Z, Zhang J, Sun J, Jin H. Surface Acoustic Wave Sensors for Wireless Temperature Measurements above 1200 Degree Celsius. Sensors. 2024; 24(15):4945. https://doi.org/10.3390/s24154945
Chicago/Turabian StyleZhang, Hong, Danyu Mu, Zichao Zhang, Jikai Zhang, Jiabao Sun, and Hao Jin. 2024. "Surface Acoustic Wave Sensors for Wireless Temperature Measurements above 1200 Degree Celsius" Sensors 24, no. 15: 4945. https://doi.org/10.3390/s24154945