3.2. Analysis
This study extends earlier work; it investigates the differences in the FDI accuracy achieved by using optimum vs. non-optimized sensor set solutions.
The research on defect detection approaches may be loosely split into two camps, model-based and data-driven, depending on the a priori process knowledge needed. The model-based approaches need extensive knowledge of physics underpinning the process. Some examples of approaches that are based on the models described in the thesis include parameter estimation methods, parity relation methods, and fault tree methods. Data-driven methods often presume access to a large quantity of historical process data. These methods enable the diagnostic system to be presented with a priori knowledge of the historical process data through feature extraction. Qualitative feature extraction methods include expert systems and qualitative trend analysis. There are also both statistical and non-statistical techniques for extracting quantitative features.
Figure 3.
Testing Approaches.
Figure 3.
Testing Approaches.
Quantitative feature extraction strategies include PLS/PCA, ANNs (artificial neural networks), and SVMs (support vector machines) [
4,
6,
14,
17,
23]. We assume without further investigation that there exists both the measurement data collected from nominal and problematic system behavior and a model used for residual generation. Model information is used to identify groups of residual generators that are sensitive to the intended faults but insensitive to unwanted ones, hence achieving fault isolability characteristics. Data from both the model analysis and the training data are used to select residual sets for fault identification and isolation. After additional processing, the residuals are used to calculate the test amounts. One frequent approach to establishing the test quantities is to choose the “best” residual generators based on the structural analysis results. The diagnostic system is intended to consider the correlation between multiple residual generators to boost detection performance without resorting to additional residual generators.
In industrial settings, diagnostic systems face a significant challenge in evaluating defects based on limited data. While there is always a need for insightful data, working in the industry sometimes means dealing with incomplete or inaccurate datasets and shaky measurements. The complexity of this issue grows in tandem with the level of sophistication of the data transmission technique and the breadth of the process database. These problems may be fixed in several ways, from eliminating missing data to making informed predictions. Other machine learning methods can handle missing data without further processing, whereas most others cannot. When it comes to imperfect data, BBN can manage it with ease. It uses probabilities to assess the degree of uncertainty and, on occasion, uses expectation maximization techniques to learn parameters when there is some missing data in the data set.
It is essential in machine learning that models can be generalized. Overfitting, inability to generalize, and a large number of false positives, when given with a new observation, are all possible outcomes of a model that is too complex about the issue we are attempting to describe. Because of this, pruning is used in methods such as decision trees and neural networks. The clipping method seeks to avoid overtraining by cutting off the workouts suddenly. Further, most of these methods are strictly controlled, expert-led methodologies used by medical practitioners. A significant limitation of the controlled methods is that the model can only make assumptions about the kind of issues that have been encountered. Some models may use ambiguity rejection or distance rejection to account for the fact that they now know less about the system and its history.
Unfortunately, not all machine learning systems directly use the numerical data collected by sensors during the diagnostic process. Most machine learning methods, including SVMs and ANNs, need continuous data to operate. While continuous variables are used in certain methods, such as decision trees and BBN, others use discrete ones. Decision trees may now include numeric target variables in C4.5. Discrete variables are used by certain algorithms like ID3 and CART [
17,
23], whereas continuous variables are transformed into intervals by others. Although continuous random variables with Gaussian distributions are permitted in BBNs, discrete random variables are the norm. The fuzzy neural network is the only method capable of processing various data types (numeric and character). The result is a nebulous assemblage of both quantitative and qualitative information. The diagnostic process may be improved with the operator’s help if he or she can make the most of their knowledge and experience. One option is to create a model that can process numeric and textual information to achieve this goal. Complex or hybrid systems are characterized by frequent configuration changes, several operation modes, and the introduction or removal of sensors. This is particularly true with the Internet of Things (IoT) systems.
Hybrid dynamical systems need a combination of continuous and discrete dynamics for accurate diagnosis. Here, cutting-edge tools that can adapt to ever-evolving models and measurement needs are necessary for precise diagnoses.
Current industrial processes are transforming to become intelligent ones as Industry 4.0 becomes more popular. To detect and diagnose any issues that may arise and to maintain tabs on the general health of the operation, many modern manufacturing processes use a suite of highly sophisticated sensors. Process efficiency in today’s highly automated industrial environments requires close monitoring, process control, and timely, accurate corrective actions. Keeping an acceptable performance in industrial processes that usually contain multiple forms of defects is a serious problem.
One of the essential control techniques available for overseeing processes is failure detection and diagnosis (FDD) since most businesses want to improve their process performance by enhancing their FDD capabilities [
23]. Fault detection and diagnosis (FDD) has two major purposes: number one, monitoring the condition of the procedure (the variables), and secondly, exposing the occurrence of flaws, their features, and their causes. Maintaining high production outcomes and throughput in industrial processes necessitates using fast, accurate, and effective procedures for identifying and diagnosing process or equipment faults that may threaten the presentation of the whole system.
Over several decades, numerous businesses and educational institutions have paid close attention to the FDD for a wide range of processes due to numerous considerable benefits, including decreased production-related costs and improved quality and output. In particular, FDD has been crucial in various fields of industrial engineering, including the semiconductor industry, the chemical industry, and the software business.
Thus, there is an increasing demand for reliable problem detection and diagnosis to guarantee operations function effectively and economically, avoiding expensive downtime that can affect product yield or process throughput. Most of the time, the FDD work is supervised by devices that collect data from various processes and equipment (i.e., sensors). Many current applications and research have investigated alternative analytical ways of detecting a problematic process (or variable), and many have employed different mathematical or probabilistic models to diagnose, isolate, and determine the reasons for a process abnormality after detection [
6,
15].
FDD approaches have been theorized and used in industry. FDD’s toolset includes data-, model-, and knowledge-based methodologies. Data-driven and model-based techniques have influenced FDD for industrial processes because of its simplicity of use. These techniques need minimal modeling and process expertise (or relevant variables).
Online, real-time FDD is another key problem in process monitoring, particularly for organizations that employ potentially harmful processes, like industrial-scale chemical processes. The FDD tool may boost productivity and security by identifying abnormalities at their early stages. However, problems in the control loops of chemical processes are notoriously difficult to pinpoint because of the masking effects of feedback. Many have proposed using a set of FDD models that can distinguish between broken and functional states to fix the problem.
Numerous successful FDD approaches have been developed due to the widespread interest in using FDD tools for process monitoring from various research and application disciplines. Each of the four phases of a general process monitoring procedure—fault detection, isolation, identification, and recovery—makes up a single loop.
Numerous specialized phrases are often used in process monitoring, and these terms must be defined and categorized in line with their unique features. An error occurs when a process variable exhibits unexpected behavior or an abrupt change in value. The gap between a threshold value and a fault value indicates an undesirable deviation, which may lead to a malfunction or a total breakdown of the process. It’s conceivable that flaws have already been incorporated into the process, and there’s no set rate at which they become evident. Disturbances are often classified as sudden (also called stepwise fault), incipient (also called drifting fault), or intermittent based on the rate at which they initially become noticeable. Defects may also be categorized according to their reflection method, with additive and multiplicative faults. A failure occurs when the system cannot complete its intended task because of an unending delay. Therefore, the failure indicates that a process unit’s role has concluded and is caused by some interrelated factors [
4]. Based on their predictability, failures may be classified as random (unpredictable), deterministic, or systematic/casual. The vast majority of breakdowns occur due to random causes. When anything goes wrong, it causes a breakdown, which is an abnormal halt in the functioning of a process or system. Now we may conclude that a problem should never be ignored.
One of the most well-known methods for monitoring processes in a commercial context is statistical process control (SPC), also known as statistical process monitoring (SPM). To be used with traditional univariate SPM methods for monitoring a single process variable, the observed process variables must be independent, stable, and normally distributed (i.e., Gaussian). However, for many real-world industrial processes, this assumption is usually wrong since the underlying properties of these processes are multivariate, non-linear, non-Gaussian, and non-stationary. This drastically reduces the usefulness of conventional SPC methods. Inadequate findings may occur If a univariate control chart is used to examine a multivariate system with non-linear and cross-correlated variables. Many enhanced multivariate statistical process monitoring (MSPM) approaches have been developed to overcome the inadequacies of old univariate SPC methods for monitoring dynamic industrial processes. Useful statistics are a part of these methods. Many researchers have devoted time and effort to the problem of monitoring non-measurable process variables like status and parameters. As a consequence, process-based models and practical estimating methodologies have found widespread application in the field. In particular, there has been a lot of interest in a wide variety of effective process monitoring and fault diagnosis (PM-FD) systems built upon multivariate statistical methods since the advent of sensor technology that enables the regular collection of data on a large number of process variables [
4]. Systems like this are intended to detect and isolate issues in real-time in a process. The study presented two well-known multivariate-based projection strategies for process monitoring [
4]. The principal component analysis (PCA) and partial least squares (PLS) techniques are the names given to these methodologies, respectively. Both continuous and multivariate batch processes were used to demonstrate these methods.
The authors of this research elaborated on the merits of combining multi-block PLS with contribution plots. The mineral processing facilities used PCA and PLS in both their continuous and batch processes. By considering the long-term tendencies of semiconductor wafer batches, Peres et al. [
15] enhanced the multivariate SPC (MSPC) method for defect detection. The authors of this work employed the log transformation approach to linearize the acquired data to analyze the long-term variability in optical emission data from a semiconductor plasma etcher. The goal was to simplify working with the information gained from this. In addition, they provided a reliable method for defect diagnosis by fusing optical emission data with sensor data and filtering the findings to account for the impact of the machine age. They had laid the groundwork for a system for defect detection that drew from several data sources and accounted for human error. A new fault detection and isolation (FDI) method for the on-board diagnosis of early faults in dynamic systems was introduced by Okwuosa et al. [
2]. They also provided a detailed statistical approach for doing so.
The goal of this approach was to create a novel method of fault detection and isolation (FDI). Principles of the local approach, a mathematical and statistical theory underlying the possibility of performing preliminary FDI operations on board, were outlined in this study [
2]. The researchers who found these results were responsible for another study. To maintain optimum process conditions and prevent any significant loss of system efficiency in today’s industrial environment [
25], it is crucial to detect flaws as soon as possible. While multiple MSPM techniques have been used for fault detection in a wide range of industrial processes, MSPM based on conventional fault detection approaches may struggle to handle issues in their infancy. Okwuosa introduced a new incipient fault detection method predicated on a comprehensive fault detection index after discussing the six distinct fault detection indices used in conventional PCA and PLS [
2]. This was conducted to launch the strategy built on a comprehensive fault detection index. The moving average (MA) and the exponentially weighted moving average (EWMA) methods were employed to determine these indices.
To enhance the usefulness of MCCs (multivariate control charts) in process monitoring, Paul et al. [
16] introduced cutting-edge variable selection techniques combined with multivariate statistical process control (MSPC) methodologies. In total, 30 MSPC strategies were identified and organized into ten groups, defined by their shared objectives and process monitoring methods. Specifically, they split it into pre-processing and post-processing filter phases and a wrapper step. Among the several MSPM strategies, principal component analysis-based methods have seen widespread use for fault detection and diagnosis. Principal component analysis (PCA) is a dimensionality reduction technique that uses the data’s variance structure to quickly identify problems. Recursive principal component analysis (RPCA), dynamic principal component analysis (DPCA), and kernel principal component analysis (KPCA) are all PCA variants that have found use in the monitoring of non-linear, adaptive, and other complex industrial processes. Pinto et al. [
14] introduced two RPCA methods to deal with the ongoing change in semiconductor manufacturing. They did a recursive update of the correlation matrix to reach this point. Sample-wise recursion was handled using the rank-one modification technique, while block-wise recursion was handled using the Lanczostridiagonalization technique.
Qi et al. [
16] voiced worry that DPCA decompositions were not sensitive to early process faults, which typically affect the covariance structure of variables and the underlying DPCA decomposition. The MSPC plan was amended to include a regional strategy, and the goal was achieved. They also developed a 3D fault diagnosis chart to display potential shifts brought on by a malfunction. Using this method, they could zero in on the most crucial aspects of the process that may be to blame for the issues. Qi generalized and analyzed five distinct fault diagnosis techniques in [
16]. After demonstrating that the five methods may be combined into three general ones, they provided the predicted contributions and the strategies’ relative contributions. They found that different diagnosis techniques may not provide a proper diagnosis for naïve sensor errors of low magnitude, based on their study on the diagnosis of process failures. The presented fault diagnosis algorithms were assessed by Monte Carlo simulation. By estimating non-linearity in processes, Schimmack and Mercorelli [
7] have developed a real-time fast block AKPCA-based variable window monitoring system that can detect and respond to normal drifts by adjusting the parameters and size of adaptive charts. Researchers showed the model’s resilience and improved detectability of process deviations by using it to monitor two conventional processes.
Once a problem has been identified, the following step is often to isolate the offending process or variable to learn more about the issue, such as what led to the failure. Fault diagnostics involves learning as much as possible about the problem at hand, including how it came to be, where it originated, when it was first observed, and what effects it has. It is common to think of fault diagnosis as a multi-stage process that includes detection, isolation, identification, classification, and assessment. Today, several industries make use of the proven FDD techniques. For this reason, many researchers have delved into the topic of FDD, using methods like multivariate analysis, analytical methods, artificial intelligence, etc., as proposed by Mercoelli [
59]. In particular, several useful ways have been developed and used for dealing with various types of FDI difficulties, including hierarchical methodologies. Data-driven solutions for spotting and removing problematic variables mostly fall into two categories: the supervised approach and the unsupervised approach. In the supervised approach, the fault subspace or area of abnormal operation for each faulty state must be defined a priori; in the unsupervised approach, however, the faults may be separated using just a priori knowledge, such as the contribution plot of faulty variables from measured data.
However, if the a priori information on error-prone occurrences is unknown, the supervised strategy may not be effective. The FDI method consists of two primary stages: residual generation and evaluation. To isolate the process parameter change that leads to the observed structural damages, a locally focused approach and two straightforward statistical tests, such as sensitivity analysis and a min–max test-based residual evaluation method, are offered. To illustrate the efficacy of the developed technique, two example case studies of vibration-based structural damage diagnoses were presented. Fault detection is difficult because of the complexity of many industrial processes, which can include several process variables, quantifiable data that is contaminated or cross-correlated, and intricate links between symptoms and issues. In response, several useful methods for fault identification have been developed to record the characteristics of the flaws.
Daga et al. [
60] also discussed the basic problems and methods for monitoring processes, such as FDD, which may be applied to specific technical operations. In this study, the authors introduced a knowledge-based technique and a suite of defect detection algorithms that draw on process and signal models to extract targeted features from collected data. They created analytic symptoms and heuristic symptoms, often caused by human operators, as an additional source of information to compare the behaviors of the process (i.e., normal and aberrant behaviors). They also introduced fuzzy algorithms, classification systems, and approximate reasoning based on if-then rules. Many different processes in the chemical industry may benefit from using FDD since it is such an effective process monitoring tool. To guarantee safe and efficient operations, the chemical industry requires state-of-the-art FDD methods for detecting and analyzing process flaws. Among the several FDD methods available, principal component analysis (PCA) is widely used for identifying outliers in chemical procedures. Fault detection and diagnostics (FDD) in chemical processes are also acknowledged as an integral part of the abnormal event management (AEM) system, which includes the three essential duties of fault detection, fault diagnosis, and corrective action for the defects in a process. But it is well-known that many researchers are working on overcoming many practical obstacles in real chemical processes, such as how to cope with non-linearity, non-stationarity, autocorrelation, cross-correlation, non-Gaussian distribution, etc., rather than on applications of FDD. Note that most genuine chemical process data has multi-scale features. In other words, real-world data from chemical processes have a lot of time- and frequency-dependent features and noise.
Some crucial elements are frequently hidden since undiscovered inaccuracies may contaminate the measured data. Methods for troubleshooting two different chemical processes were examined. After evaluating the prediction error of the NN models for sensor or component failure detection, the root cause of the issue was identified using a radial basis function (RBF) neural classification strategy. Two representative chemical processes were used to evaluate the neutral network (NN) models. Okwuosa [
2] introduced a subspace strategy for developing efficient FDII (fault detection, isolation, and identification) systems. In this study, four methods were presented for producing FDII residuals.
The lateral dynamic system of the vehicle was analyzed virtually to show that the proposed algorithms are robust against inputs while being sensitive to faulty sensors and actuators. Using MCCA (multiset canonical correlation analysis), Okwuosa [
2] presented a unique joint–individual process monitoring technique for chemical processes. In this study, the researchers utilized MCCA to identify common process characteristics and projected data from a single operational unit in terms of joint and individual attributes. Finally, they created statistics to seek commonalities across the two levels of analysis. Waghen et al. [
61] reflected on the pros and cons of using the FDD techniques in chemical processes. They investigated typical problems encountered in actual chemical processes and looked at how big data analytics and AI-based approaches may provide solutions. To improve production efficiency in the semiconductor industries, more process and quality management methods and process automation are required. Developing a solid FDC system that can be used in the semiconductor industry is becoming more important. It is essential to maintain regular and secure production by minimizing or doing away with any irregular variation seen in semiconductor manufacturing processes via prompt and precise issue diagnostics.
Accordingly, fault detection and classification (FDC) in semiconductor manufacturing is now generally accepted as an integral element of the APC (advanced process control) framework for maximizing production efficiency (yield and machine utilization) while minimizing process variation [
18]. The semiconductor industry has benefited from developing and implementing many FDC techniques that aid in issue identification and root cause investigation.
In their analysis, Wang et al. [
3], to solve this problem, used fault diagnosis (PM-FD) and KPI-based process monitoring schemes to identify deficient process variables and their root causes from the viewpoint of performance decline. Many examples were provided to prove the method’s validity and usefulness. Wang et al. [
3] looked at a problem with defect detection in non-linear systems, as shown by the Takagi–Sugeno model. The authors of this study combined the influence of disturbances with residual generators to amplify the fault effects while dampening perturbation ones. Thus, Wang et al. [
3] suggested a unique hybrid FD approach for non-linear systems. This was accomplished using a mathematical model and some ingenious AI techniques. They created a neural parameter estimator (NPE) based on a single-parameter fault model, two NPE structures, and updating techniques for FDI weights and decision logic. The team also implemented a fault-tolerant observer to better predict future system states. Fault diagnosis may be broken down into four categories, as provided by Waghen et al. [
61]: unknown faults, known faults, multiple dependent faults, and multiple independent faults. They achieved this by integrating features based on the information’s path with those derived from two ways (a modified distance-based approach and a modified causal dependency-based approach). Xiao adjusted a Gaussian kernel for defect identification using five evaluation criteria and two data preparation techniques (KFDA and KPCA).
Using Tennessee Eastman benchmark process data, an ANN model was verified and compared to the KFDA and KPCA. Bindi employs an NLGBN model to detect manufacturing line difficulties [
20]. They devised a three-layer NLGBN model for feature extraction from noisy data, using sigmoidal functions to find non-linear correlations between process and latent variables. Xio presented two evidence-based decision fusion systems. First, they employed resampling to boost diversity performance, then “ALL fusion” and “SELECTIVE fusion” for defect detection and classification. Xio studied fault detection in chemical processes. They employed circuit card assembly (CCA) and a moving window to find multiplicative initial faults. Xio identified defects despite class imbalance. The researchers analyzed 19 fault detection algorithms utilizing data from two semiconductor manufacturing processes. Yang et al. [
62] developed a method for identifying process defects. They applied Granger causality analysis and presented a causality score based on the DTW (dynamic time warping) approach.
Yang et al. [
62] studied FDI input signal design. This study offered a graph–theory based multi-parametric programming strategy to minimize the FDI complexity and increase the computing efficiency. Yang et al. [
62] created a unique way of building the FDD framework, making it adaptable to various complexity, noise, and dimensionality concerns. The authors employed wavelet analysis, kernel discriminant analysis, and support vector machine classifiers to discover chemical process defects. The Tennessee Eastman benchmark shows that the combined strategies work. Ferentinos et al. presented a data-driven fault detection method based on recursive transformed component analysis to discover process faults quickly [
20]. To decrease computational complexity, they changed the process data using rank-one modification—a detection index—which Ferentinos et al. developed for identifying process characteristics. Ferentinos et al. introduced a PM-FD framework based on KPIs to enhance the monitoring of large-scale industrial operations. When there is a static statistical correlation between process variables and KPIs, they use a static method. MSPC approaches were sensitive to mild changes in the process variables.
This study established a new FDD approach to improve early fault isolation (the data covariance structure). First, they utilized sparse regression to detect problematic process variables due to a data distribution structure change. Then, they used distribution dissimilarity decomposition to uncover differences between problematic and normal process circumstances. Yang et al. [
62] studied failure detection using connected process data. They invented dynamic graph embedding to secure the process variables and data, such as the structural information in process variables and serial (or temporal) relationships among process data digital gene expression (DGE). Later, they updated similarity matrices based on the finite Markov chain to highlight essential process aspects. To illustrate the method’s feasibility, they used the Tennessee Eastman benchmark. Ferentinos et al. [
20] studied non-linearity in semiconductor etching to find defects.
Researchers used multiway principal polynomial analysis to identify faults. They used a numerical example and semiconductor etching data to verify their technique worked. Achieving full fault tolerance of the neural network (the absence of a negative reaction of the network to defects arising in it) is possible in the case of at least a six-fold redundancy of neurons [
53], which is not always acceptable due to the technical complexity of the hardware implementation. In the absence of redundancy, as noted by the authors of [
63], almost any defect always affects the completeness and quality of the performance of functions since all its components are involved in neural network calculations.
The widespread use of neural networks in various fields of technology necessitates the development of methods for improving their reliability and corresponding estimates of reliability characteristics. The study of the reliability of neural networks and the degree of their gradual degradation is almost impossible without modeling defects in neuro components [
41]. The faults considered in the studies are models of defects that determine the place, time, and nature of their manifestation.
One of the shortcomings of the existing defect models is that they take into account only the weight coefficients set to zero states as defects and the maximum or minimum signal values at the outputs of neurons. In reality, physical defects manifest themselves in a much more complex way and can often lead to several malfunctions of a neuron.