Spannhake, J.; Schulz, O.; Helwig, A.; Krenkow, A.; Müller, G.; Doll, T.
High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials. Sensors 2006, 6, 405-419.
https://doi.org/10.3390/s6040405
AMA Style
Spannhake J, Schulz O, Helwig A, Krenkow A, Müller G, Doll T.
High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials. Sensors. 2006; 6(4):405-419.
https://doi.org/10.3390/s6040405
Chicago/Turabian Style
Spannhake, Jan, Olaf Schulz, Andreas Helwig, Angelika Krenkow, Gerhard Müller, and Theodor Doll.
2006. "High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials" Sensors 6, no. 4: 405-419.
https://doi.org/10.3390/s6040405
APA Style
Spannhake, J., Schulz, O., Helwig, A., Krenkow, A., Müller, G., & Doll, T.
(2006). High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials. Sensors, 6(4), 405-419.
https://doi.org/10.3390/s6040405