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Journal: Sensors, 2006
Volume: 6
Number: 405

Article: High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
Authors: by Jan Spannhake, Olaf Schulz, Andreas Helwig, Angelika Krenkow, Gerhard Müller and Theodor Doll
Link: https://www.mdpi.com/1424-8220/6/4/405

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