A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing
Abstract
:Introduction
Theory
Experimental Section
Results and Discussion
Conclusions
Acknowledgments
References
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Chemical compounds | n | ρ(g/cm3) | STC (mN/m) | VP (kPa) | BP (°C) | Δ<nd> (nm) | LLF |
---|---|---|---|---|---|---|---|
Iso-propanol | 1.377 | 0.785 | 20.93 | 6.8 | 82.4 | 1000 | 0.22 |
Ethanol | 1.360 | 0.785 | 22.8 | 5.8 | 78 | 950 | 0.23 |
Xylene | 1.501 | 1.454 | 38.8 | 0.046 | 214 | 1400 | 0.22 |
Acetone | 1.359 | 0.791 | 23.46 | 30.8 | 56 | 998 | 0.23 |
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De Stefano, L.; Malecki, K.; Della Corte, F.G.; Moretti, L.; Rea, I.; Rotiroti, L.; Rendina, I. A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing. Sensors 2006, 6, 680-687. https://doi.org/10.3390/s6060680
De Stefano L, Malecki K, Della Corte FG, Moretti L, Rea I, Rotiroti L, Rendina I. A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing. Sensors. 2006; 6(6):680-687. https://doi.org/10.3390/s6060680
Chicago/Turabian StyleDe Stefano, Luca, Krzysztof Malecki, Francesco G. Della Corte, Luigi Moretti, Ilaria Rea, Lucia Rotiroti, and Ivo Rendina. 2006. "A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing" Sensors 6, no. 6: 680-687. https://doi.org/10.3390/s6060680